JPS5558555A - Electronic device and its manufacture - Google Patents

Electronic device and its manufacture

Info

Publication number
JPS5558555A
JPS5558555A JP13055078A JP13055078A JPS5558555A JP S5558555 A JPS5558555 A JP S5558555A JP 13055078 A JP13055078 A JP 13055078A JP 13055078 A JP13055078 A JP 13055078A JP S5558555 A JPS5558555 A JP S5558555A
Authority
JP
Japan
Prior art keywords
film
solidified
irradiating
super
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13055078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153858B2 (enrdf_load_stackoverflow
Inventor
Tokio Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13055078A priority Critical patent/JPS5558555A/ja
Publication of JPS5558555A publication Critical patent/JPS5558555A/ja
Publication of JPS6153858B2 publication Critical patent/JPS6153858B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP13055078A 1978-10-25 1978-10-25 Electronic device and its manufacture Granted JPS5558555A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13055078A JPS5558555A (en) 1978-10-25 1978-10-25 Electronic device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13055078A JPS5558555A (en) 1978-10-25 1978-10-25 Electronic device and its manufacture

Publications (2)

Publication Number Publication Date
JPS5558555A true JPS5558555A (en) 1980-05-01
JPS6153858B2 JPS6153858B2 (enrdf_load_stackoverflow) 1986-11-19

Family

ID=15036950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13055078A Granted JPS5558555A (en) 1978-10-25 1978-10-25 Electronic device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5558555A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62185341A (ja) * 1986-02-08 1987-08-13 Mitsubishi Electric Corp 樹脂封止型半導体装置
JP2009001353A (ja) * 2007-06-19 2009-01-08 Seiko Epson Corp 被記録媒体トレイ用スタッカ装置及び記録装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02138857U (enrdf_load_stackoverflow) * 1989-04-26 1990-11-20

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50114978A (enrdf_load_stackoverflow) * 1974-02-18 1975-09-09
JPS5141964A (enrdf_load_stackoverflow) * 1974-10-07 1976-04-08 Nippon Electric Co

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50114978A (enrdf_load_stackoverflow) * 1974-02-18 1975-09-09
JPS5141964A (enrdf_load_stackoverflow) * 1974-10-07 1976-04-08 Nippon Electric Co

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62185341A (ja) * 1986-02-08 1987-08-13 Mitsubishi Electric Corp 樹脂封止型半導体装置
JP2009001353A (ja) * 2007-06-19 2009-01-08 Seiko Epson Corp 被記録媒体トレイ用スタッカ装置及び記録装置

Also Published As

Publication number Publication date
JPS6153858B2 (enrdf_load_stackoverflow) 1986-11-19

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