JPS5558555A - Electronic device and its manufacture - Google Patents
Electronic device and its manufactureInfo
- Publication number
- JPS5558555A JPS5558555A JP13055078A JP13055078A JPS5558555A JP S5558555 A JPS5558555 A JP S5558555A JP 13055078 A JP13055078 A JP 13055078A JP 13055078 A JP13055078 A JP 13055078A JP S5558555 A JPS5558555 A JP S5558555A
- Authority
- JP
- Japan
- Prior art keywords
- film
- solidified
- irradiating
- super
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To increase humidity resistance, by irradiating B or P ions on the outer surface of an organic, insulating film which has been heat-solidified.
CONSTITUTION: A semiconductor base plate on which a PN junction has been formed is coated with polymide-isoindolo-quinazolinedione film 9. After this, it is given heat treatment at 200°C for 60 min and is heat solidified. Then, it is etched by hydrazine hydrate+ehylenediamine. Next, by irradiating B ions, 1012/cm3, at 10 KV, the outer surface of film 9 is super-solidified (10). By selecting the kind of charged particles, accelerating voltage, the amount of irradiation, it is possible to obtain a super-solidified film of the desired characteristics and thickness. By this, the film coating is made impenetrable by moisture. It is free from defect, has excellent coating characteristics and proper elasticity, and improves the reliability of semiconductor device.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13055078A JPS5558555A (en) | 1978-10-25 | 1978-10-25 | Electronic device and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13055078A JPS5558555A (en) | 1978-10-25 | 1978-10-25 | Electronic device and its manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5558555A true JPS5558555A (en) | 1980-05-01 |
JPS6153858B2 JPS6153858B2 (en) | 1986-11-19 |
Family
ID=15036950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13055078A Granted JPS5558555A (en) | 1978-10-25 | 1978-10-25 | Electronic device and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5558555A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62185341A (en) * | 1986-02-08 | 1987-08-13 | Mitsubishi Electric Corp | Resin sealed type semiconductor device |
JP2009001353A (en) * | 2007-06-19 | 2009-01-08 | Seiko Epson Corp | Stacker device for recording medium tray, and recording apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02138857U (en) * | 1989-04-26 | 1990-11-20 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50114978A (en) * | 1974-02-18 | 1975-09-09 | ||
JPS5141964A (en) * | 1974-10-07 | 1976-04-08 | Nippon Electric Co |
-
1978
- 1978-10-25 JP JP13055078A patent/JPS5558555A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50114978A (en) * | 1974-02-18 | 1975-09-09 | ||
JPS5141964A (en) * | 1974-10-07 | 1976-04-08 | Nippon Electric Co |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62185341A (en) * | 1986-02-08 | 1987-08-13 | Mitsubishi Electric Corp | Resin sealed type semiconductor device |
JP2009001353A (en) * | 2007-06-19 | 2009-01-08 | Seiko Epson Corp | Stacker device for recording medium tray, and recording apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6153858B2 (en) | 1986-11-19 |
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