JPS5558528A - Electron beam projecting/imaging device - Google Patents

Electron beam projecting/imaging device

Info

Publication number
JPS5558528A
JPS5558528A JP13116578A JP13116578A JPS5558528A JP S5558528 A JPS5558528 A JP S5558528A JP 13116578 A JP13116578 A JP 13116578A JP 13116578 A JP13116578 A JP 13116578A JP S5558528 A JPS5558528 A JP S5558528A
Authority
JP
Japan
Prior art keywords
accelerating
electrode
electron beam
constitution
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13116578A
Other languages
English (en)
Other versions
JPS5653847B2 (ja
Inventor
Kiichi Takamoto
Kunio Koyabu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13116578A priority Critical patent/JPS5558528A/ja
Publication of JPS5558528A publication Critical patent/JPS5558528A/ja
Publication of JPS5653847B2 publication Critical patent/JPS5653847B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3175—Projection methods, i.e. transfer substantially complete pattern to substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP13116578A 1978-10-25 1978-10-25 Electron beam projecting/imaging device Granted JPS5558528A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13116578A JPS5558528A (en) 1978-10-25 1978-10-25 Electron beam projecting/imaging device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13116578A JPS5558528A (en) 1978-10-25 1978-10-25 Electron beam projecting/imaging device

Publications (2)

Publication Number Publication Date
JPS5558528A true JPS5558528A (en) 1980-05-01
JPS5653847B2 JPS5653847B2 (ja) 1981-12-22

Family

ID=15051518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13116578A Granted JPS5558528A (en) 1978-10-25 1978-10-25 Electron beam projecting/imaging device

Country Status (1)

Country Link
JP (1) JPS5558528A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5385176A (en) * 1977-01-04 1978-07-27 Siemens Ag Photoelectric picture projector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5385176A (en) * 1977-01-04 1978-07-27 Siemens Ag Photoelectric picture projector

Also Published As

Publication number Publication date
JPS5653847B2 (ja) 1981-12-22

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