JPS5556671A - Photoelectric converter - Google Patents

Photoelectric converter

Info

Publication number
JPS5556671A
JPS5556671A JP12960978A JP12960978A JPS5556671A JP S5556671 A JPS5556671 A JP S5556671A JP 12960978 A JP12960978 A JP 12960978A JP 12960978 A JP12960978 A JP 12960978A JP S5556671 A JPS5556671 A JP S5556671A
Authority
JP
Japan
Prior art keywords
electrode
hole
xcdxte
evaporated
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12960978A
Other languages
Japanese (ja)
Other versions
JPS6220710B2 (en
Inventor
Takao Chikamura
Shinichiro Ishihara
Shinji Fujiwara
Shoichi Fukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12960978A priority Critical patent/JPS5556671A/en
Publication of JPS5556671A publication Critical patent/JPS5556671A/en
Publication of JPS6220710B2 publication Critical patent/JPS6220710B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14665—Imagers using a photoconductor layer

Abstract

PURPOSE:To suppress the increase in dark currents at the junction of a hole blocking layer on electrode steps and (Zm1-xCdxTe)1-y (1n2Te3)y by forming the electrode steps whose height is less than 0.2mum. CONSTITUTION:A PSG 15 in a p-type Si 10 having a gate electrode 14 and a gate oxide film 16 is provided in a hole shape at the portion of an n<+>-layer 11. After the device is heat-treated in a mixed gas of N2+O2+POCl3, light etching is performed, and the step formed by the electrode opening and the electrode 14 is smoothed. Then, an electrode 17 is provided by sputtering Ti and the like to the thickness of less than 0.2mum, and an electrode step 22 is formed. Thereafter, a hole-blocking layer 18 of Zn S and the like is evaporated about 0.6-0.5mum, a photoelectric conductor (Zn1-xCdxTe)1-y(In2Te3)y 19 is evavorated about 0.6-2.5mum, and heat treatment is made in a vacuum at 300-600 deg.C for 4-30 minutes. Then, a transparent electrode 20 containing SnO2 is evaporated to 0.1-0.5mum. In this constitution, the photoelectric converter with low dark currents and high sensitivity can be obtained.
JP12960978A 1978-10-20 1978-10-20 Photoelectric converter Granted JPS5556671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12960978A JPS5556671A (en) 1978-10-20 1978-10-20 Photoelectric converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12960978A JPS5556671A (en) 1978-10-20 1978-10-20 Photoelectric converter

Publications (2)

Publication Number Publication Date
JPS5556671A true JPS5556671A (en) 1980-04-25
JPS6220710B2 JPS6220710B2 (en) 1987-05-08

Family

ID=15013683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12960978A Granted JPS5556671A (en) 1978-10-20 1978-10-20 Photoelectric converter

Country Status (1)

Country Link
JP (1) JPS5556671A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0439511U (en) * 1990-07-19 1992-04-03

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110715A (en) * 1974-07-05 1976-01-28 Hitachi Ltd
JPS5366115A (en) * 1976-11-26 1978-06-13 Hitachi Ltd Solid image pickup equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110715A (en) * 1974-07-05 1976-01-28 Hitachi Ltd
JPS5366115A (en) * 1976-11-26 1978-06-13 Hitachi Ltd Solid image pickup equipment

Also Published As

Publication number Publication date
JPS6220710B2 (en) 1987-05-08

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