JPS5555204A - Pattern detection method of printed board for lamination - Google Patents

Pattern detection method of printed board for lamination

Info

Publication number
JPS5555204A
JPS5555204A JP12840878A JP12840878A JPS5555204A JP S5555204 A JPS5555204 A JP S5555204A JP 12840878 A JP12840878 A JP 12840878A JP 12840878 A JP12840878 A JP 12840878A JP S5555204 A JPS5555204 A JP S5555204A
Authority
JP
Japan
Prior art keywords
pattern
printed board
laser beam
substrate
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12840878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6131801B2 (enrdf_load_stackoverflow
Inventor
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12840878A priority Critical patent/JPS5555204A/ja
Publication of JPS5555204A publication Critical patent/JPS5555204A/ja
Publication of JPS6131801B2 publication Critical patent/JPS6131801B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12840878A 1978-10-20 1978-10-20 Pattern detection method of printed board for lamination Granted JPS5555204A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12840878A JPS5555204A (en) 1978-10-20 1978-10-20 Pattern detection method of printed board for lamination

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12840878A JPS5555204A (en) 1978-10-20 1978-10-20 Pattern detection method of printed board for lamination

Publications (2)

Publication Number Publication Date
JPS5555204A true JPS5555204A (en) 1980-04-23
JPS6131801B2 JPS6131801B2 (enrdf_load_stackoverflow) 1986-07-23

Family

ID=14984034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12840878A Granted JPS5555204A (en) 1978-10-20 1978-10-20 Pattern detection method of printed board for lamination

Country Status (1)

Country Link
JP (1) JPS5555204A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970947A (ja) * 1982-10-15 1984-04-21 Hitachi Ltd 印刷配線基板のパタ−ン検出方法
JPS59232344A (ja) * 1983-06-16 1984-12-27 Hitachi Ltd 配線パタ−ン検出装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970947A (ja) * 1982-10-15 1984-04-21 Hitachi Ltd 印刷配線基板のパタ−ン検出方法
JPS59232344A (ja) * 1983-06-16 1984-12-27 Hitachi Ltd 配線パタ−ン検出装置

Also Published As

Publication number Publication date
JPS6131801B2 (enrdf_load_stackoverflow) 1986-07-23

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