JPS5548120A - Conveying system - Google Patents
Conveying systemInfo
- Publication number
- JPS5548120A JPS5548120A JP12078478A JP12078478A JPS5548120A JP S5548120 A JPS5548120 A JP S5548120A JP 12078478 A JP12078478 A JP 12078478A JP 12078478 A JP12078478 A JP 12078478A JP S5548120 A JPS5548120 A JP S5548120A
- Authority
- JP
- Japan
- Prior art keywords
- computer
- card
- wafer
- truck
- loaded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Discharge Of Articles From Conveyors (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
PURPOSE:To appropriately automate the control of conveyance, by causing a card to correspond to a conveyed piece, reading the card and causing a computer to perform judgement. CONSTITUTION:When a truck 7 whereon a wafer and a card are loaded is introduced into a conveying passage, an operator causes a terminal unit 51 to read the card and causes a computer 13 to instruct treatment conditions to treat the wafer by a treating unit. The treated wafer is housed in a box. A treatment end signal is applied to the computer 13. A wafer necessary to be conveyed to a different treatment chamber for next treatment is loaded on the truck 7 and a corresponding card is inserted into the terminal unit 51 to transmit the information on the card to the computer 13. The computer 13 collates the information with the contents of a memory 15 to appoint the number of the next treatment chamber to a truck controller 12. The computer 13 regulates a branching unit by the truck controller 12 in accordance with a program in the memory 15.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12078478A JPS5548120A (en) | 1978-09-30 | 1978-09-30 | Conveying system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12078478A JPS5548120A (en) | 1978-09-30 | 1978-09-30 | Conveying system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5548120A true JPS5548120A (en) | 1980-04-05 |
Family
ID=14794908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12078478A Pending JPS5548120A (en) | 1978-09-30 | 1978-09-30 | Conveying system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5548120A (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5821318A (en) * | 1981-07-28 | 1983-02-08 | Toshiba Corp | Transporting system for wafer |
JPS5842795A (en) * | 1981-09-08 | 1983-03-12 | Tateyama Alum Kogyo Kk | Vertical suspension type surface treatment for aluminum or aluminum alloy |
JPS58161340A (en) * | 1982-03-19 | 1983-09-24 | Hitachi Ltd | Receiving and delivering system of product |
JPS5918651A (en) * | 1982-07-22 | 1984-01-31 | Toshiba Corp | Manufacture of semiconductor wafer |
JPS60176547U (en) * | 1984-04-27 | 1985-11-22 | 富士通株式会社 | Wafer processing equipment |
JPS6169143A (en) * | 1984-09-12 | 1986-04-09 | Nec Kansai Ltd | Conveyance for semiconductor wafer |
JPS61197017U (en) * | 1985-05-31 | 1986-12-09 | ||
JPS6240399A (en) * | 1985-08-14 | 1987-02-21 | Toyo Giken Kogyo Kk | Conveyor with frame pitch changer |
JPS6247500A (en) * | 1985-08-23 | 1987-03-02 | C Uyemura & Co Ltd | Inter-work spacing adjustment device for treatment device |
JPS6278812A (en) * | 1985-10-01 | 1987-04-11 | Nippon Texas Instr Kk | Semiconductor information processing device |
JPH04106020A (en) * | 1990-08-24 | 1992-04-08 | Nippon Avionics Co Ltd | Carrying control device |
JPH04131655U (en) * | 1991-05-20 | 1992-12-03 | 昭和アルミニウム株式会社 | Device to prevent misalignment of carrier for transporting processed material in anodizing processing material drying equipment |
JPH09155264A (en) * | 1995-12-11 | 1997-06-17 | Toyama Keikinzoku Kogyo Kk | Surface treating device for aluminum or aluminum alloy material |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5135957A (en) * | 1974-09-20 | 1976-03-26 | Matsushita Electric Ind Co Ltd | BUTSUPINJIDOSHI WAKE SOCHI |
-
1978
- 1978-09-30 JP JP12078478A patent/JPS5548120A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5135957A (en) * | 1974-09-20 | 1976-03-26 | Matsushita Electric Ind Co Ltd | BUTSUPINJIDOSHI WAKE SOCHI |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5821318A (en) * | 1981-07-28 | 1983-02-08 | Toshiba Corp | Transporting system for wafer |
JPH0242915B2 (en) * | 1981-09-08 | 1990-09-26 | ||
JPS5842795A (en) * | 1981-09-08 | 1983-03-12 | Tateyama Alum Kogyo Kk | Vertical suspension type surface treatment for aluminum or aluminum alloy |
JPS58161340A (en) * | 1982-03-19 | 1983-09-24 | Hitachi Ltd | Receiving and delivering system of product |
JPH0526336B2 (en) * | 1982-03-19 | 1993-04-15 | Hitachi Seisakusho Kk | |
JPS5918651A (en) * | 1982-07-22 | 1984-01-31 | Toshiba Corp | Manufacture of semiconductor wafer |
JPS60176547U (en) * | 1984-04-27 | 1985-11-22 | 富士通株式会社 | Wafer processing equipment |
JPS6169143A (en) * | 1984-09-12 | 1986-04-09 | Nec Kansai Ltd | Conveyance for semiconductor wafer |
JPH053140B2 (en) * | 1984-09-12 | 1993-01-14 | Kansai Nippon Electric | |
JPH0450255Y2 (en) * | 1985-05-31 | 1992-11-26 | ||
JPS61197017U (en) * | 1985-05-31 | 1986-12-09 | ||
JPS6240399A (en) * | 1985-08-14 | 1987-02-21 | Toyo Giken Kogyo Kk | Conveyor with frame pitch changer |
JPS6247500A (en) * | 1985-08-23 | 1987-03-02 | C Uyemura & Co Ltd | Inter-work spacing adjustment device for treatment device |
JPH057480B2 (en) * | 1985-08-23 | 1993-01-28 | Uemura Kogyo Kk | |
JPS6278812A (en) * | 1985-10-01 | 1987-04-11 | Nippon Texas Instr Kk | Semiconductor information processing device |
JPH04106020A (en) * | 1990-08-24 | 1992-04-08 | Nippon Avionics Co Ltd | Carrying control device |
JPH04131655U (en) * | 1991-05-20 | 1992-12-03 | 昭和アルミニウム株式会社 | Device to prevent misalignment of carrier for transporting processed material in anodizing processing material drying equipment |
JPH09155264A (en) * | 1995-12-11 | 1997-06-17 | Toyama Keikinzoku Kogyo Kk | Surface treating device for aluminum or aluminum alloy material |
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