JPS5548120A - Conveying system - Google Patents

Conveying system

Info

Publication number
JPS5548120A
JPS5548120A JP12078478A JP12078478A JPS5548120A JP S5548120 A JPS5548120 A JP S5548120A JP 12078478 A JP12078478 A JP 12078478A JP 12078478 A JP12078478 A JP 12078478A JP S5548120 A JPS5548120 A JP S5548120A
Authority
JP
Japan
Prior art keywords
computer
card
wafer
truck
loaded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12078478A
Other languages
Japanese (ja)
Inventor
Masakazu Yokoyama
Mitsusada Shibasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12078478A priority Critical patent/JPS5548120A/en
Publication of JPS5548120A publication Critical patent/JPS5548120A/en
Pending legal-status Critical Current

Links

Landscapes

  • Discharge Of Articles From Conveyors (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

PURPOSE:To appropriately automate the control of conveyance, by causing a card to correspond to a conveyed piece, reading the card and causing a computer to perform judgement. CONSTITUTION:When a truck 7 whereon a wafer and a card are loaded is introduced into a conveying passage, an operator causes a terminal unit 51 to read the card and causes a computer 13 to instruct treatment conditions to treat the wafer by a treating unit. The treated wafer is housed in a box. A treatment end signal is applied to the computer 13. A wafer necessary to be conveyed to a different treatment chamber for next treatment is loaded on the truck 7 and a corresponding card is inserted into the terminal unit 51 to transmit the information on the card to the computer 13. The computer 13 collates the information with the contents of a memory 15 to appoint the number of the next treatment chamber to a truck controller 12. The computer 13 regulates a branching unit by the truck controller 12 in accordance with a program in the memory 15.
JP12078478A 1978-09-30 1978-09-30 Conveying system Pending JPS5548120A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12078478A JPS5548120A (en) 1978-09-30 1978-09-30 Conveying system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12078478A JPS5548120A (en) 1978-09-30 1978-09-30 Conveying system

Publications (1)

Publication Number Publication Date
JPS5548120A true JPS5548120A (en) 1980-04-05

Family

ID=14794908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12078478A Pending JPS5548120A (en) 1978-09-30 1978-09-30 Conveying system

Country Status (1)

Country Link
JP (1) JPS5548120A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821318A (en) * 1981-07-28 1983-02-08 Toshiba Corp Transporting system for wafer
JPS5842795A (en) * 1981-09-08 1983-03-12 Tateyama Alum Kogyo Kk Vertical suspension type surface treatment for aluminum or aluminum alloy
JPS58161340A (en) * 1982-03-19 1983-09-24 Hitachi Ltd Receiving and delivering system of product
JPS5918651A (en) * 1982-07-22 1984-01-31 Toshiba Corp Manufacture of semiconductor wafer
JPS60176547U (en) * 1984-04-27 1985-11-22 富士通株式会社 Wafer processing equipment
JPS6169143A (en) * 1984-09-12 1986-04-09 Nec Kansai Ltd Conveyance for semiconductor wafer
JPS61197017U (en) * 1985-05-31 1986-12-09
JPS6240399A (en) * 1985-08-14 1987-02-21 Toyo Giken Kogyo Kk Conveyor with frame pitch changer
JPS6247500A (en) * 1985-08-23 1987-03-02 C Uyemura & Co Ltd Inter-work spacing adjustment device for treatment device
JPS6278812A (en) * 1985-10-01 1987-04-11 Nippon Texas Instr Kk Semiconductor information processing device
JPH04106020A (en) * 1990-08-24 1992-04-08 Nippon Avionics Co Ltd Carrying control device
JPH04131655U (en) * 1991-05-20 1992-12-03 昭和アルミニウム株式会社 Device to prevent misalignment of carrier for transporting processed material in anodizing processing material drying equipment
JPH09155264A (en) * 1995-12-11 1997-06-17 Toyama Keikinzoku Kogyo Kk Surface treating device for aluminum or aluminum alloy material

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135957A (en) * 1974-09-20 1976-03-26 Matsushita Electric Ind Co Ltd BUTSUPINJIDOSHI WAKE SOCHI

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135957A (en) * 1974-09-20 1976-03-26 Matsushita Electric Ind Co Ltd BUTSUPINJIDOSHI WAKE SOCHI

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821318A (en) * 1981-07-28 1983-02-08 Toshiba Corp Transporting system for wafer
JPH0242915B2 (en) * 1981-09-08 1990-09-26
JPS5842795A (en) * 1981-09-08 1983-03-12 Tateyama Alum Kogyo Kk Vertical suspension type surface treatment for aluminum or aluminum alloy
JPS58161340A (en) * 1982-03-19 1983-09-24 Hitachi Ltd Receiving and delivering system of product
JPH0526336B2 (en) * 1982-03-19 1993-04-15 Hitachi Seisakusho Kk
JPS5918651A (en) * 1982-07-22 1984-01-31 Toshiba Corp Manufacture of semiconductor wafer
JPS60176547U (en) * 1984-04-27 1985-11-22 富士通株式会社 Wafer processing equipment
JPS6169143A (en) * 1984-09-12 1986-04-09 Nec Kansai Ltd Conveyance for semiconductor wafer
JPH053140B2 (en) * 1984-09-12 1993-01-14 Kansai Nippon Electric
JPH0450255Y2 (en) * 1985-05-31 1992-11-26
JPS61197017U (en) * 1985-05-31 1986-12-09
JPS6240399A (en) * 1985-08-14 1987-02-21 Toyo Giken Kogyo Kk Conveyor with frame pitch changer
JPS6247500A (en) * 1985-08-23 1987-03-02 C Uyemura & Co Ltd Inter-work spacing adjustment device for treatment device
JPH057480B2 (en) * 1985-08-23 1993-01-28 Uemura Kogyo Kk
JPS6278812A (en) * 1985-10-01 1987-04-11 Nippon Texas Instr Kk Semiconductor information processing device
JPH04106020A (en) * 1990-08-24 1992-04-08 Nippon Avionics Co Ltd Carrying control device
JPH04131655U (en) * 1991-05-20 1992-12-03 昭和アルミニウム株式会社 Device to prevent misalignment of carrier for transporting processed material in anodizing processing material drying equipment
JPH09155264A (en) * 1995-12-11 1997-06-17 Toyama Keikinzoku Kogyo Kk Surface treating device for aluminum or aluminum alloy material

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