JPS5539901B2 - - Google Patents
Info
- Publication number
- JPS5539901B2 JPS5539901B2 JP2616573A JP2616573A JPS5539901B2 JP S5539901 B2 JPS5539901 B2 JP S5539901B2 JP 2616573 A JP2616573 A JP 2616573A JP 2616573 A JP2616573 A JP 2616573A JP S5539901 B2 JPS5539901 B2 JP S5539901B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Jigs For Machine Tools (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2616573A JPS5539901B2 (enExample) | 1973-03-07 | 1973-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2616573A JPS5539901B2 (enExample) | 1973-03-07 | 1973-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49115665A JPS49115665A (enExample) | 1974-11-05 |
| JPS5539901B2 true JPS5539901B2 (enExample) | 1980-10-14 |
Family
ID=12185926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2616573A Expired JPS5539901B2 (enExample) | 1973-03-07 | 1973-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5539901B2 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5914726Y2 (ja) * | 1977-02-10 | 1984-05-01 | 富士通株式会社 | 光学式回転トランスデユ−サ |
| JPS54585A (en) * | 1977-06-02 | 1979-01-05 | Terumetsuku Kk | Automatic angle setting device |
| JPS5441078A (en) * | 1977-09-08 | 1979-03-31 | Kobatoron Kk | Device for inspecting semiconductor |
| JPS55105347A (en) * | 1979-02-07 | 1980-08-12 | Sanyo Electric Co Ltd | Apparatus for scribing single-crystal wafer |
| JPS5642342A (en) * | 1979-09-14 | 1981-04-20 | Jeol Ltd | Facing device of wafer |
| JPS5818713A (ja) * | 1981-07-25 | 1983-02-03 | Nippon Kogaku Kk <Nikon> | 円板物体の位置決め装置 |
| JPS58210633A (ja) * | 1982-06-01 | 1983-12-07 | Nec Corp | ウエハの自動位置合わせ装置 |
| JPS59150840U (ja) * | 1983-03-30 | 1984-10-09 | 中浦 一彦 | 目地専用コンクリ−トミキサ− |
| JPS6187352A (ja) * | 1985-09-27 | 1986-05-02 | Hitachi Ltd | オリエンテーシヨンフラツトの位置決め装置 |
| JPH0644588B2 (ja) * | 1988-10-21 | 1994-06-08 | 信越半導体株式会社 | オリエンテーションフラット・マークの位置検出装置 |
-
1973
- 1973-03-07 JP JP2616573A patent/JPS5539901B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49115665A (enExample) | 1974-11-05 |