JPS5642342A - Facing device of wafer - Google Patents
Facing device of waferInfo
- Publication number
- JPS5642342A JPS5642342A JP11860879A JP11860879A JPS5642342A JP S5642342 A JPS5642342 A JP S5642342A JP 11860879 A JP11860879 A JP 11860879A JP 11860879 A JP11860879 A JP 11860879A JP S5642342 A JPS5642342 A JP S5642342A
- Authority
- JP
- Japan
- Prior art keywords
- light
- cutting
- wafer
- wafers
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Abstract
PURPOSE:To set the direction of wafers so that they are facing exactly by a method wherein a cutting off of a straight line is provided in the periphery of wafer, a plate that a hole is made on the straight line around the cutting off portion is arranged, the light is illuminated thereupon and the passing light through the holes on the plate is detected. CONSTITUTION:The wafer 5 having the straight line cutting off portion K is placed on a rotary base 1, and the center of both the wafer are the base made coincided, when the base 1 is turned by a motor 3, the cutting off portion K is crossed at a right angle with the center line O, the same quantity of light from a light source 8 enters to the detector 9a and 9b passing through holes 6a, 6b in the fixed base 7. The quantity of light is compared 10, and the motor 3 is stopped to set the wafers at desired positions. When the cutting off portion is staggered, since the light is interrupted or the detected quantity of light is different, the motor will not be stopped. In this constitution, wafers can be set in a required directions accurately.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11860879A JPS5642342A (en) | 1979-09-14 | 1979-09-14 | Facing device of wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11860879A JPS5642342A (en) | 1979-09-14 | 1979-09-14 | Facing device of wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5642342A true JPS5642342A (en) | 1981-04-20 |
Family
ID=14740762
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11860879A Pending JPS5642342A (en) | 1979-09-14 | 1979-09-14 | Facing device of wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5642342A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5818713A (en) * | 1981-07-25 | 1983-02-03 | Nippon Kogaku Kk <Nikon> | Positioning device for discoid object |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49115665A (en) * | 1973-03-07 | 1974-11-05 |
-
1979
- 1979-09-14 JP JP11860879A patent/JPS5642342A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49115665A (en) * | 1973-03-07 | 1974-11-05 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5818713A (en) * | 1981-07-25 | 1983-02-03 | Nippon Kogaku Kk <Nikon> | Positioning device for discoid object |
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