JPS5539901B2 - - Google Patents

Info

Publication number
JPS5539901B2
JPS5539901B2 JP2616573A JP2616573A JPS5539901B2 JP S5539901 B2 JPS5539901 B2 JP S5539901B2 JP 2616573 A JP2616573 A JP 2616573A JP 2616573 A JP2616573 A JP 2616573A JP S5539901 B2 JPS5539901 B2 JP S5539901B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2616573A
Other languages
Japanese (ja)
Other versions
JPS49115665A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2616573A priority Critical patent/JPS5539901B2/ja
Publication of JPS49115665A publication Critical patent/JPS49115665A/ja
Publication of JPS5539901B2 publication Critical patent/JPS5539901B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Jigs For Machine Tools (AREA)
JP2616573A 1973-03-07 1973-03-07 Expired JPS5539901B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2616573A JPS5539901B2 (enrdf_load_stackoverflow) 1973-03-07 1973-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2616573A JPS5539901B2 (enrdf_load_stackoverflow) 1973-03-07 1973-03-07

Publications (2)

Publication Number Publication Date
JPS49115665A JPS49115665A (enrdf_load_stackoverflow) 1974-11-05
JPS5539901B2 true JPS5539901B2 (enrdf_load_stackoverflow) 1980-10-14

Family

ID=12185926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2616573A Expired JPS5539901B2 (enrdf_load_stackoverflow) 1973-03-07 1973-03-07

Country Status (1)

Country Link
JP (1) JPS5539901B2 (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5914726Y2 (ja) * 1977-02-10 1984-05-01 富士通株式会社 光学式回転トランスデユ−サ
JPS54585A (en) * 1977-06-02 1979-01-05 Terumetsuku Kk Automatic angle setting device
JPS5441078A (en) * 1977-09-08 1979-03-31 Kobatoron Kk Device for inspecting semiconductor
JPS55105347A (en) * 1979-02-07 1980-08-12 Sanyo Electric Co Ltd Apparatus for scribing single-crystal wafer
JPS5642342A (en) * 1979-09-14 1981-04-20 Jeol Ltd Facing device of wafer
JPS5818713A (ja) * 1981-07-25 1983-02-03 Nippon Kogaku Kk <Nikon> 円板物体の位置決め装置
JPS58210633A (ja) * 1982-06-01 1983-12-07 Nec Corp ウエハの自動位置合わせ装置
JPS59150840U (ja) * 1983-03-30 1984-10-09 中浦　一彦 目地専用コンクリ−トミキサ−
JPS6187352A (ja) * 1985-09-27 1986-05-02 Hitachi Ltd オリエンテーシヨンフラツトの位置決め装置
JPH0644588B2 (ja) * 1988-10-21 1994-06-08 信越半導体株式会社 オリエンテーションフラット・マークの位置検出装置

Also Published As

Publication number Publication date
JPS49115665A (enrdf_load_stackoverflow) 1974-11-05

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