JPS5535324A - Automatic focusing device - Google Patents

Automatic focusing device

Info

Publication number
JPS5535324A
JPS5535324A JP10751178A JP10751178A JPS5535324A JP S5535324 A JPS5535324 A JP S5535324A JP 10751178 A JP10751178 A JP 10751178A JP 10751178 A JP10751178 A JP 10751178A JP S5535324 A JPS5535324 A JP S5535324A
Authority
JP
Japan
Prior art keywords
stage
output
objective lenses
converter
drives
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10751178A
Other languages
Japanese (ja)
Inventor
Kiyoshi Nakagawa
Hiroyuki Ibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10751178A priority Critical patent/JPS5535324A/en
Publication of JPS5535324A publication Critical patent/JPS5535324A/en
Pending legal-status Critical Current

Links

Landscapes

  • Automatic Focus Adjustment (AREA)
  • Focusing (AREA)

Abstract

PURPOSE: To enable focusing of lenses to be simultaneously accomplished by providing the automatic focusing device which is provided with the servo mechanism of elevating and oscillating the stage by detecting air pressure change to the optical system which simultaneously compares and observes two objects with two objective lenses.
CONSTITUTION: Two objective lenses 9, 10 of a microscope 8 are opposing to two objects on a photo mask 7. Air nozzles 11, 12 are provided to the objective lenses 9, 10 and converters 16, 17 which are inputted with the air pressure in the nozzles and output the deviations from reference values as quantities of electricity are provided in continuation thereto. The output of the converter 17 drives an elevating drive motor 3 via servo amplifier 23 to control the vertical position of the first stage 1. The output of the converter 16 drives an oscillating motor 6 via servo amplifier 23 to control the olcillating angle of the second stage 4 mounted oscillatably with respect to the first stage 1.
COPYRIGHT: (C)1980,JPO&Japio
JP10751178A 1978-09-04 1978-09-04 Automatic focusing device Pending JPS5535324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10751178A JPS5535324A (en) 1978-09-04 1978-09-04 Automatic focusing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10751178A JPS5535324A (en) 1978-09-04 1978-09-04 Automatic focusing device

Publications (1)

Publication Number Publication Date
JPS5535324A true JPS5535324A (en) 1980-03-12

Family

ID=14461046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10751178A Pending JPS5535324A (en) 1978-09-04 1978-09-04 Automatic focusing device

Country Status (1)

Country Link
JP (1) JPS5535324A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59111610A (en) * 1982-12-17 1984-06-27 Hitachi Ltd Automatic focusing device
JPS6286319A (en) * 1985-10-14 1987-04-20 Hitachi Ltd Automatic focus adjusting device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51107825A (en) * 1975-03-19 1976-09-24 Hitachi Ltd
US4068947A (en) * 1973-03-09 1978-01-17 The Perkin-Elmer Corporation Optical projection and scanning apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4068947A (en) * 1973-03-09 1978-01-17 The Perkin-Elmer Corporation Optical projection and scanning apparatus
JPS51107825A (en) * 1975-03-19 1976-09-24 Hitachi Ltd

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59111610A (en) * 1982-12-17 1984-06-27 Hitachi Ltd Automatic focusing device
JPS6286319A (en) * 1985-10-14 1987-04-20 Hitachi Ltd Automatic focus adjusting device

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