JPS5535324A - Automatic focusing device - Google Patents
Automatic focusing deviceInfo
- Publication number
- JPS5535324A JPS5535324A JP10751178A JP10751178A JPS5535324A JP S5535324 A JPS5535324 A JP S5535324A JP 10751178 A JP10751178 A JP 10751178A JP 10751178 A JP10751178 A JP 10751178A JP S5535324 A JPS5535324 A JP S5535324A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- output
- objective lenses
- converter
- drives
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Automatic Focus Adjustment (AREA)
- Focusing (AREA)
Abstract
PURPOSE: To enable focusing of lenses to be simultaneously accomplished by providing the automatic focusing device which is provided with the servo mechanism of elevating and oscillating the stage by detecting air pressure change to the optical system which simultaneously compares and observes two objects with two objective lenses.
CONSTITUTION: Two objective lenses 9, 10 of a microscope 8 are opposing to two objects on a photo mask 7. Air nozzles 11, 12 are provided to the objective lenses 9, 10 and converters 16, 17 which are inputted with the air pressure in the nozzles and output the deviations from reference values as quantities of electricity are provided in continuation thereto. The output of the converter 17 drives an elevating drive motor 3 via servo amplifier 23 to control the vertical position of the first stage 1. The output of the converter 16 drives an oscillating motor 6 via servo amplifier 23 to control the olcillating angle of the second stage 4 mounted oscillatably with respect to the first stage 1.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10751178A JPS5535324A (en) | 1978-09-04 | 1978-09-04 | Automatic focusing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10751178A JPS5535324A (en) | 1978-09-04 | 1978-09-04 | Automatic focusing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5535324A true JPS5535324A (en) | 1980-03-12 |
Family
ID=14461046
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10751178A Pending JPS5535324A (en) | 1978-09-04 | 1978-09-04 | Automatic focusing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5535324A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59111610A (en) * | 1982-12-17 | 1984-06-27 | Hitachi Ltd | Automatic focusing device |
JPS6286319A (en) * | 1985-10-14 | 1987-04-20 | Hitachi Ltd | Automatic focus adjusting device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51107825A (en) * | 1975-03-19 | 1976-09-24 | Hitachi Ltd | |
US4068947A (en) * | 1973-03-09 | 1978-01-17 | The Perkin-Elmer Corporation | Optical projection and scanning apparatus |
-
1978
- 1978-09-04 JP JP10751178A patent/JPS5535324A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4068947A (en) * | 1973-03-09 | 1978-01-17 | The Perkin-Elmer Corporation | Optical projection and scanning apparatus |
JPS51107825A (en) * | 1975-03-19 | 1976-09-24 | Hitachi Ltd |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59111610A (en) * | 1982-12-17 | 1984-06-27 | Hitachi Ltd | Automatic focusing device |
JPS6286319A (en) * | 1985-10-14 | 1987-04-20 | Hitachi Ltd | Automatic focus adjusting device |
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