JPS5529758A - Detector employing extremely-fine corpuscule resist film - Google Patents

Detector employing extremely-fine corpuscule resist film

Info

Publication number
JPS5529758A
JPS5529758A JP10302678A JP10302678A JPS5529758A JP S5529758 A JPS5529758 A JP S5529758A JP 10302678 A JP10302678 A JP 10302678A JP 10302678 A JP10302678 A JP 10302678A JP S5529758 A JPS5529758 A JP S5529758A
Authority
JP
Japan
Prior art keywords
corpuscule
fine
resist film
extremely
detector employing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10302678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6222096B2 (en, 2012
Inventor
Atsushi Abe
Kuni Ogawa
Masahiro Nishikawa
Satoshi Sekido
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10302678A priority Critical patent/JPS5529758A/ja
Priority to US06/066,332 priority patent/US4313338A/en
Priority to CA333,788A priority patent/CA1123052A/en
Priority to GB7928825A priority patent/GB2029583B/en
Priority to DE2933394A priority patent/DE2933394C2/de
Priority to DE2953771A priority patent/DE2953771C1/de
Publication of JPS5529758A publication Critical patent/JPS5529758A/ja
Priority to US06/275,254 priority patent/US4362765A/en
Publication of JPS6222096B2 publication Critical patent/JPS6222096B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP10302678A 1978-08-18 1978-08-23 Detector employing extremely-fine corpuscule resist film Granted JPS5529758A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP10302678A JPS5529758A (en) 1978-08-23 1978-08-23 Detector employing extremely-fine corpuscule resist film
US06/066,332 US4313338A (en) 1978-08-18 1979-08-14 Gas sensing device
CA333,788A CA1123052A (en) 1978-08-18 1979-08-15 Gas sensing device and method of manufacturing same
GB7928825A GB2029583B (en) 1978-08-18 1979-08-17 Gas sensing device and method of manufacturing the same
DE2933394A DE2933394C2 (de) 1978-08-18 1979-08-17 Gasdetektor und Verfahren zu seiner Herstellung
DE2953771A DE2953771C1 (de) 1978-08-18 1979-08-17 Gasdetektor
US06/275,254 US4362765A (en) 1978-08-18 1981-06-19 Method of manufacturing a gas sensing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10302678A JPS5529758A (en) 1978-08-23 1978-08-23 Detector employing extremely-fine corpuscule resist film

Publications (2)

Publication Number Publication Date
JPS5529758A true JPS5529758A (en) 1980-03-03
JPS6222096B2 JPS6222096B2 (en, 2012) 1987-05-15

Family

ID=14343126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10302678A Granted JPS5529758A (en) 1978-08-18 1978-08-23 Detector employing extremely-fine corpuscule resist film

Country Status (1)

Country Link
JP (1) JPS5529758A (en, 2012)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58105049A (ja) * 1981-12-17 1983-06-22 Matsushita Electric Ind Co Ltd Ｎｏ↓２ガス検知器ならびに検知方法
JPS5990040A (ja) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd 一酸化炭素ガス検知器
JPS62222153A (ja) * 1984-09-29 1987-09-30 Hiroshi Komiyama 金属と誘電体とを含むガス感応性複合体とその製造方法
JPH0343399U (en, 2012) * 1989-08-29 1991-04-23
JP2010002366A (ja) * 2008-06-23 2010-01-07 Riken Keiki Co Ltd 半導体式ガス検知装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52131791A (en) * 1976-04-28 1977-11-04 Murata Manufacturing Co Gas detecting element
JPS5378890A (en) * 1976-12-21 1978-07-12 Nitto Electric Ind Co Manufacturing method and apparatus for gas sensor element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52131791A (en) * 1976-04-28 1977-11-04 Murata Manufacturing Co Gas detecting element
JPS5378890A (en) * 1976-12-21 1978-07-12 Nitto Electric Ind Co Manufacturing method and apparatus for gas sensor element

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58105049A (ja) * 1981-12-17 1983-06-22 Matsushita Electric Ind Co Ltd Ｎｏ↓２ガス検知器ならびに検知方法
JPS5990040A (ja) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd 一酸化炭素ガス検知器
JPS62222153A (ja) * 1984-09-29 1987-09-30 Hiroshi Komiyama 金属と誘電体とを含むガス感応性複合体とその製造方法
JPH0343399U (en, 2012) * 1989-08-29 1991-04-23
JP2010002366A (ja) * 2008-06-23 2010-01-07 Riken Keiki Co Ltd 半導体式ガス検知装置

Also Published As

Publication number Publication date
JPS6222096B2 (en, 2012) 1987-05-15

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