JPS5527602A - Electron beam exposure device - Google Patents

Electron beam exposure device

Info

Publication number
JPS5527602A
JPS5527602A JP9994778A JP9994778A JPS5527602A JP S5527602 A JPS5527602 A JP S5527602A JP 9994778 A JP9994778 A JP 9994778A JP 9994778 A JP9994778 A JP 9994778A JP S5527602 A JPS5527602 A JP S5527602A
Authority
JP
Japan
Prior art keywords
counter
register
output
comparator
contents
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9994778A
Other languages
Japanese (ja)
Inventor
Seigo Igaki
Noriaki Nakayama
Yasuo Furukawa
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9994778A priority Critical patent/JPS5527602A/en
Publication of JPS5527602A publication Critical patent/JPS5527602A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To reduce time required for picture drawing, by adding a double clock pulse generator circuit to a counter circuit and thereby operating interlaced scanning. CONSTITUTION:Start-point data X1 and end-point data X2 are loaded respectively to X1 register 13, X2 register 15 and X counter 14 by X1 and X2 load signals. Next, the contents of X, register 13 and X counter 14 are compared by X1 comparator 16, and the contents of X2 register 15 and X counter 14 are compared by comparator 17. When a coincidence signal is output by X1 and X2 comparators 16 and 17, controller 18 produces an up or down pulse in accordance with the output. When this pulse is impressed on X counter 14 via double pulse generator circuits 20a and 20b, X counter counts two in the direction from X1 to X2 or in the direction from X2 to X1. Consequently, interlaced exposure can be done by the scanning by the output of X counter 14.
JP9994778A 1978-08-18 1978-08-18 Electron beam exposure device Pending JPS5527602A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9994778A JPS5527602A (en) 1978-08-18 1978-08-18 Electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9994778A JPS5527602A (en) 1978-08-18 1978-08-18 Electron beam exposure device

Publications (1)

Publication Number Publication Date
JPS5527602A true JPS5527602A (en) 1980-02-27

Family

ID=14260896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9994778A Pending JPS5527602A (en) 1978-08-18 1978-08-18 Electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS5527602A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106905A (en) * 1983-11-15 1985-06-12 Hitachi Metals Ltd Production of permanent magnet alloy powder
JPS60155608A (en) * 1983-12-20 1985-08-15 エクソン　リサ−チ　アンド　エンヂニアリング　コムパニ− Reduction of producing powdery alloy from mixed metal iron oxide
JPS63105909A (en) * 1986-04-30 1988-05-11 Sumitomo Metal Mining Co Ltd Production of sintered alloy

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106905A (en) * 1983-11-15 1985-06-12 Hitachi Metals Ltd Production of permanent magnet alloy powder
JPS60155608A (en) * 1983-12-20 1985-08-15 エクソン　リサ−チ　アンド　エンヂニアリング　コムパニ− Reduction of producing powdery alloy from mixed metal iron oxide
JPS63105909A (en) * 1986-04-30 1988-05-11 Sumitomo Metal Mining Co Ltd Production of sintered alloy

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