JPS5526181B2 - - Google Patents
Info
- Publication number
- JPS5526181B2 JPS5526181B2 JP5253677A JP5253677A JPS5526181B2 JP S5526181 B2 JPS5526181 B2 JP S5526181B2 JP 5253677 A JP5253677 A JP 5253677A JP 5253677 A JP5253677 A JP 5253677A JP S5526181 B2 JPS5526181 B2 JP S5526181B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/16—Heating by glow discharge
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Discharge Heating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2620164A DE2620164C2 (de) | 1976-05-07 | 1976-05-07 | Verfahren und Vorrichtung zur Überwachung von stromstarken Glimmentladungen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5340644A JPS5340644A (en) | 1978-04-13 |
| JPS5526181B2 true JPS5526181B2 (pt) | 1980-07-11 |
Family
ID=5977282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5253677A Granted JPS5340644A (en) | 1976-05-07 | 1977-05-07 | Method of monitoring glow discharge of large current density and apparatus therefor |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPS5340644A (pt) |
| BR (1) | BR7702855A (pt) |
| DD (1) | DD129846A5 (pt) |
| DE (1) | DE2620164C2 (pt) |
| FR (1) | FR2350761A1 (pt) |
| GB (1) | GB1522925A (pt) |
| IT (1) | IT1084635B (pt) |
| PL (1) | PL197863A1 (pt) |
| ZA (1) | ZA772644B (pt) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5521918U (pt) * | 1978-07-26 | 1980-02-13 | ||
| DE10004556C2 (de) * | 2000-02-02 | 2003-11-27 | Ald Vacuum Techn Ag | Anordnung zum Erkennen von Störungen in einer elektrischen Heizung |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB756760A (en) * | 1953-05-04 | 1956-09-12 | Air Preheater | Precipitator flashover control through current and voltage response |
| BE569245A (pt) * | 1953-12-09 | |||
| FR1127831A (fr) * | 1954-07-22 | 1956-12-26 | Apra Precipitator Corp | Circuit avec relais de protection |
| US2911571A (en) * | 1956-04-10 | 1959-11-03 | Hoerder Huettenunion Ag | Operation of glow discharges |
| CH389797A (de) * | 1959-08-17 | 1965-03-31 | Berghaus Elektrophysik Anst | Vorrichtung zur Vermeidung von plötzlichen Änderungen des Entladungszustandes für mit stromstarken Glimmentladungen betriebene Entladungsgefässe |
| DE1565364B2 (de) * | 1966-04-02 | 1971-09-02 | AEG Elotherm GmbH, 5630 Remscheid Hasten | Schaltung zum schutz fuer die heizleiter von induktoren |
| US3740579A (en) * | 1966-10-03 | 1973-06-19 | Ex Cell O Corp | Zener coupled amplifier circuit with feedback |
| FR1541370A (fr) * | 1966-11-08 | 1968-10-04 | Berghaus Elektrophysik Anst | Procédé et dispositif de contrôle du comportement électrique d'une décharge luminescente à forte intensité, pour des opérations métallurgiques |
| US3809955A (en) * | 1973-03-26 | 1974-05-07 | Graco Inc | Safety circuit for electrostatic spray gun |
| US3801899A (en) * | 1973-03-26 | 1974-04-02 | Gen Electric | Means for detecting the inception of corona discharges within induction apparatus |
| DE2606395C3 (de) * | 1976-02-18 | 1979-01-18 | Ionit Anstalt Bernhard Berghaus, Vaduz | Verfahren und Vorrichtung zur Überwachung des elektrischen Verhaltens einer stromstarken Glimmentladung |
-
1976
- 1976-05-07 DE DE2620164A patent/DE2620164C2/de not_active Expired
-
1977
- 1977-04-25 GB GB17067/77A patent/GB1522925A/en not_active Expired
- 1977-05-03 ZA ZA00772644A patent/ZA772644B/xx unknown
- 1977-05-04 PL PL19786377A patent/PL197863A1/xx unknown
- 1977-05-04 BR BR7702855A patent/BR7702855A/pt unknown
- 1977-05-05 DD DD7700198782A patent/DD129846A5/xx unknown
- 1977-05-06 IT IT23312/77A patent/IT1084635B/it active
- 1977-05-06 FR FR7713850A patent/FR2350761A1/fr active Pending
- 1977-05-07 JP JP5253677A patent/JPS5340644A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| BR7702855A (pt) | 1978-04-04 |
| FR2350761A1 (fr) | 1977-12-02 |
| DD129846A5 (de) | 1978-02-08 |
| DE2620164B1 (de) | 1977-11-10 |
| PL197863A1 (pl) | 1978-01-02 |
| ZA772644B (en) | 1978-04-26 |
| DE2620164C2 (de) | 1978-07-06 |
| JPS5340644A (en) | 1978-04-13 |
| GB1522925A (en) | 1978-08-31 |
| IT1084635B (it) | 1985-05-25 |