JPS5525026A - Production of color filter for single tube color image pickup tube - Google Patents

Production of color filter for single tube color image pickup tube

Info

Publication number
JPS5525026A
JPS5525026A JP9685078A JP9685078A JPS5525026A JP S5525026 A JPS5525026 A JP S5525026A JP 9685078 A JP9685078 A JP 9685078A JP 9685078 A JP9685078 A JP 9685078A JP S5525026 A JPS5525026 A JP S5525026A
Authority
JP
Japan
Prior art keywords
film
color filter
resist
color
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9685078A
Other languages
Japanese (ja)
Other versions
JPS6029923B2 (en
Inventor
Yoshiteru Urino
Yoshio Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akai Electric Co Ltd
Original Assignee
Akai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akai Electric Co Ltd filed Critical Akai Electric Co Ltd
Priority to JP53096850A priority Critical patent/JPS6029923B2/en
Publication of JPS5525026A publication Critical patent/JPS5525026A/en
Publication of JPS6029923B2 publication Critical patent/JPS6029923B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Color Television Image Signal Generators (AREA)

Abstract

PURPOSE: To reduce the number of steps, improve yield and improve working accuracy by providing the specific protecting film on the first color filter at the time of manufacturing the 3 color filter obtaining the third color from the two color filter with inorganic material.
CONSTITUTION: After the dichroic film 2M of magenta M is evaporated on a face plate 1, the protecting film 3 of material (SiO2, etc.) of a low refractive index which does not largely change spectral sensitivity characteristics is provided thereon. Next, photo resist 4 is coated and is developed, after which the film 2M other than the certain portions of the resist 4 is removed through ion etching. Next, the photo resist 4 on the film 2M is removed through plasma etching. Further, cyan is evaporated and a dichroic film 5C is deposited and formed over the entire surface, on which photo resist 4A is coated and developed, thence the exposed film 5C part is ion-etched, followed by plasma etching to remove the resist 4A, whereby the 3 color filter M + C → B(blue) is obtained. The pitch of the stripes may be made around 10μm.
COPYRIGHT: (C)1980,JPO&Japio
JP53096850A 1978-08-09 1978-08-09 Manufacturing method of color filter for single tube color image pickup tube Expired JPS6029923B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53096850A JPS6029923B2 (en) 1978-08-09 1978-08-09 Manufacturing method of color filter for single tube color image pickup tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53096850A JPS6029923B2 (en) 1978-08-09 1978-08-09 Manufacturing method of color filter for single tube color image pickup tube

Publications (2)

Publication Number Publication Date
JPS5525026A true JPS5525026A (en) 1980-02-22
JPS6029923B2 JPS6029923B2 (en) 1985-07-13

Family

ID=14175962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53096850A Expired JPS6029923B2 (en) 1978-08-09 1978-08-09 Manufacturing method of color filter for single tube color image pickup tube

Country Status (1)

Country Link
JP (1) JPS6029923B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5898959A (en) * 1981-12-09 1983-06-13 Hitachi Ltd Color solid state image pickup element and manufacture thereof
JPH0545515A (en) * 1991-08-16 1993-02-23 Toppan Printing Co Ltd Formation of multilayered interference pattern
JPH09181288A (en) * 1995-12-19 1997-07-11 Lg Semicon Co Ltd Solid state colored image pickup element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52136525A (en) * 1976-05-11 1977-11-15 Toshiba Corp Stripe filter and its manufacture

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52136525A (en) * 1976-05-11 1977-11-15 Toshiba Corp Stripe filter and its manufacture

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5898959A (en) * 1981-12-09 1983-06-13 Hitachi Ltd Color solid state image pickup element and manufacture thereof
JPH0468788B2 (en) * 1981-12-09 1992-11-04 Hitachi Ltd
JPH0545515A (en) * 1991-08-16 1993-02-23 Toppan Printing Co Ltd Formation of multilayered interference pattern
JPH09181288A (en) * 1995-12-19 1997-07-11 Lg Semicon Co Ltd Solid state colored image pickup element

Also Published As

Publication number Publication date
JPS6029923B2 (en) 1985-07-13

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