JPS5525026A - Production of color filter for single tube color image pickup tube - Google Patents
Production of color filter for single tube color image pickup tubeInfo
- Publication number
- JPS5525026A JPS5525026A JP9685078A JP9685078A JPS5525026A JP S5525026 A JPS5525026 A JP S5525026A JP 9685078 A JP9685078 A JP 9685078A JP 9685078 A JP9685078 A JP 9685078A JP S5525026 A JPS5525026 A JP S5525026A
- Authority
- JP
- Japan
- Prior art keywords
- film
- color filter
- resist
- color
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
PURPOSE: To reduce the number of steps, improve yield and improve working accuracy by providing the specific protecting film on the first color filter at the time of manufacturing the 3 color filter obtaining the third color from the two color filter with inorganic material.
CONSTITUTION: After the dichroic film 2M of magenta M is evaporated on a face plate 1, the protecting film 3 of material (SiO2, etc.) of a low refractive index which does not largely change spectral sensitivity characteristics is provided thereon. Next, photo resist 4 is coated and is developed, after which the film 2M other than the certain portions of the resist 4 is removed through ion etching. Next, the photo resist 4 on the film 2M is removed through plasma etching. Further, cyan is evaporated and a dichroic film 5C is deposited and formed over the entire surface, on which photo resist 4A is coated and developed, thence the exposed film 5C part is ion-etched, followed by plasma etching to remove the resist 4A, whereby the 3 color filter M + C → B(blue) is obtained. The pitch of the stripes may be made around 10μm.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53096850A JPS6029923B2 (en) | 1978-08-09 | 1978-08-09 | Manufacturing method of color filter for single tube color image pickup tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53096850A JPS6029923B2 (en) | 1978-08-09 | 1978-08-09 | Manufacturing method of color filter for single tube color image pickup tube |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5525026A true JPS5525026A (en) | 1980-02-22 |
JPS6029923B2 JPS6029923B2 (en) | 1985-07-13 |
Family
ID=14175962
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53096850A Expired JPS6029923B2 (en) | 1978-08-09 | 1978-08-09 | Manufacturing method of color filter for single tube color image pickup tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6029923B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5898959A (en) * | 1981-12-09 | 1983-06-13 | Hitachi Ltd | Color solid state image pickup element and manufacture thereof |
JPH0545515A (en) * | 1991-08-16 | 1993-02-23 | Toppan Printing Co Ltd | Formation of multilayered interference pattern |
JPH09181288A (en) * | 1995-12-19 | 1997-07-11 | Lg Semicon Co Ltd | Solid state colored image pickup element |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52136525A (en) * | 1976-05-11 | 1977-11-15 | Toshiba Corp | Stripe filter and its manufacture |
-
1978
- 1978-08-09 JP JP53096850A patent/JPS6029923B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52136525A (en) * | 1976-05-11 | 1977-11-15 | Toshiba Corp | Stripe filter and its manufacture |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5898959A (en) * | 1981-12-09 | 1983-06-13 | Hitachi Ltd | Color solid state image pickup element and manufacture thereof |
JPH0468788B2 (en) * | 1981-12-09 | 1992-11-04 | Hitachi Ltd | |
JPH0545515A (en) * | 1991-08-16 | 1993-02-23 | Toppan Printing Co Ltd | Formation of multilayered interference pattern |
JPH09181288A (en) * | 1995-12-19 | 1997-07-11 | Lg Semicon Co Ltd | Solid state colored image pickup element |
Also Published As
Publication number | Publication date |
---|---|
JPS6029923B2 (en) | 1985-07-13 |
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