JPS5521332B2 - - Google Patents

Info

Publication number
JPS5521332B2
JPS5521332B2 JP4919376A JP4919376A JPS5521332B2 JP S5521332 B2 JPS5521332 B2 JP S5521332B2 JP 4919376 A JP4919376 A JP 4919376A JP 4919376 A JP4919376 A JP 4919376A JP S5521332 B2 JPS5521332 B2 JP S5521332B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4919376A
Other languages
Japanese (ja)
Other versions
JPS52132678A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4919376A priority Critical patent/JPS52132678A/ja
Publication of JPS52132678A publication Critical patent/JPS52132678A/ja
Publication of JPS5521332B2 publication Critical patent/JPS5521332B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Macromolecular Compounds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP4919376A 1976-04-28 1976-04-28 High-sensitive positive type electron beam formation Granted JPS52132678A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4919376A JPS52132678A (en) 1976-04-28 1976-04-28 High-sensitive positive type electron beam formation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4919376A JPS52132678A (en) 1976-04-28 1976-04-28 High-sensitive positive type electron beam formation

Publications (2)

Publication Number Publication Date
JPS52132678A JPS52132678A (en) 1977-11-07
JPS5521332B2 true JPS5521332B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-06-09

Family

ID=12824168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4919376A Granted JPS52132678A (en) 1976-04-28 1976-04-28 High-sensitive positive type electron beam formation

Country Status (1)

Country Link
JP (1) JPS52132678A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105244A (en) * 1979-02-06 1980-08-12 Victor Co Of Japan Ltd Electron beam resist
JPS58113933A (ja) * 1981-12-26 1983-07-07 Daikin Ind Ltd レジスト材料およびそれを用いる微細レジストパタ−ンの形成方法
JPH087443B2 (ja) * 1986-12-29 1996-01-29 凸版印刷株式会社 高解像度ポジ型放射線感応性レジスト
JPS63271250A (ja) * 1986-12-29 1988-11-09 Toppan Printing Co Ltd 耐ドライエッチング性ポジ型レジスト材料

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IBM TECHNICAL DISC1OSURE BULLETIN#V16#N11=1974 *

Also Published As

Publication number Publication date
JPS52132678A (en) 1977-11-07

Similar Documents

Publication Publication Date Title
FR2349866B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR2337955B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR2343039B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR2354274B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5521332B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS52150477U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS52139541U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR2371376B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5316424U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5332183U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5382544U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5379957U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5425928Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5635142Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5521534Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5628938Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5653195B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5353060U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS178377B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS52167717U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS533236U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS52123582U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS52120586U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5345037U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS175515B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)