JPS5518915A - Read auger analyzer - Google Patents

Read auger analyzer

Info

Publication number
JPS5518915A
JPS5518915A JP9097278A JP9097278A JPS5518915A JP S5518915 A JPS5518915 A JP S5518915A JP 9097278 A JP9097278 A JP 9097278A JP 9097278 A JP9097278 A JP 9097278A JP S5518915 A JPS5518915 A JP S5518915A
Authority
JP
Japan
Prior art keywords
earth
sample surface
secondary electrons
metal net
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9097278A
Other languages
Japanese (ja)
Other versions
JPS6058823B2 (en
Inventor
Yoshitoshi Nanba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP53090972A priority Critical patent/JPS6058823B2/en
Publication of JPS5518915A publication Critical patent/JPS5518915A/en
Publication of JPS6058823B2 publication Critical patent/JPS6058823B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To produce a lead image, which is clear and easily observable, by providing three metal net electrodes and by applying an AC perturbation voltage between a sample surface and the earth. CONSTITUTION:When an AC perturbation voltage 9 is applied between a sample surface 1 and the earth, the energy of the secondary electrons generated at the sample surface are subjected to the influences therefrom. When the varied portions of the secondary electrons by the perturbation voltage pass through metal net electrodes 2 to 4, they act with a DC blocking voltage 8 impressed so that the Auger signals contained in the secondary electrons are detected by a collector electrode 6. Thus, the leak of the perturbation voltage 9 to the collector electrode is triply prevented by the three metal net electrodes 2 to 4, which are all alternately grounded to the earth, so that a clear lead image can be observed.
JP53090972A 1978-07-27 1978-07-27 Reed Augier analyzer Expired JPS6058823B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53090972A JPS6058823B2 (en) 1978-07-27 1978-07-27 Reed Augier analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53090972A JPS6058823B2 (en) 1978-07-27 1978-07-27 Reed Augier analyzer

Publications (2)

Publication Number Publication Date
JPS5518915A true JPS5518915A (en) 1980-02-09
JPS6058823B2 JPS6058823B2 (en) 1985-12-21

Family

ID=14013411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53090972A Expired JPS6058823B2 (en) 1978-07-27 1978-07-27 Reed Augier analyzer

Country Status (1)

Country Link
JP (1) JPS6058823B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161643A (en) * 1981-03-31 1982-10-05 Matsushita Electric Works Ltd Measuring device for work function

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161643A (en) * 1981-03-31 1982-10-05 Matsushita Electric Works Ltd Measuring device for work function

Also Published As

Publication number Publication date
JPS6058823B2 (en) 1985-12-21

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