JPS55166321A - Ultrathin type quartz oscillator and its manufacture - Google Patents

Ultrathin type quartz oscillator and its manufacture

Info

Publication number
JPS55166321A
JPS55166321A JP7447079A JP7447079A JPS55166321A JP S55166321 A JPS55166321 A JP S55166321A JP 7447079 A JP7447079 A JP 7447079A JP 7447079 A JP7447079 A JP 7447079A JP S55166321 A JPS55166321 A JP S55166321A
Authority
JP
Japan
Prior art keywords
resist
quartz oscillator
thin
container
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7447079A
Other languages
English (en)
Inventor
Akihito Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP7447079A priority Critical patent/JPS55166321A/ja
Publication of JPS55166321A publication Critical patent/JPS55166321A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP7447079A 1979-06-13 1979-06-13 Ultrathin type quartz oscillator and its manufacture Pending JPS55166321A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7447079A JPS55166321A (en) 1979-06-13 1979-06-13 Ultrathin type quartz oscillator and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7447079A JPS55166321A (en) 1979-06-13 1979-06-13 Ultrathin type quartz oscillator and its manufacture

Publications (1)

Publication Number Publication Date
JPS55166321A true JPS55166321A (en) 1980-12-25

Family

ID=13548166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7447079A Pending JPS55166321A (en) 1979-06-13 1979-06-13 Ultrathin type quartz oscillator and its manufacture

Country Status (1)

Country Link
JP (1) JPS55166321A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57150211A (en) * 1981-03-13 1982-09-17 Citizen Watch Co Ltd Crystal resonator
US5373267A (en) * 1989-06-14 1994-12-13 Murata Manufacturing Co., Ltd. Piezoelectric resonator device of tuning fork type
JP2011071957A (ja) * 2009-08-27 2011-04-07 Nippon Dempa Kogyo Co Ltd 表面実装用水晶振動子の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57150211A (en) * 1981-03-13 1982-09-17 Citizen Watch Co Ltd Crystal resonator
US5373267A (en) * 1989-06-14 1994-12-13 Murata Manufacturing Co., Ltd. Piezoelectric resonator device of tuning fork type
JP2011071957A (ja) * 2009-08-27 2011-04-07 Nippon Dempa Kogyo Co Ltd 表面実装用水晶振動子の製造方法
US8390176B2 (en) 2009-08-27 2013-03-05 Nihon Dempa Kogyo Co., Ltd. Stacked crystal resonator and manufacturing method thereof

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