JPS55159151A - Detector - Google Patents

Detector

Info

Publication number
JPS55159151A
JPS55159151A JP6841579A JP6841579A JPS55159151A JP S55159151 A JPS55159151 A JP S55159151A JP 6841579 A JP6841579 A JP 6841579A JP 6841579 A JP6841579 A JP 6841579A JP S55159151 A JPS55159151 A JP S55159151A
Authority
JP
Japan
Prior art keywords
gas
substrate
ultrafine particle
components
resistance film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6841579A
Other languages
Japanese (ja)
Inventor
Atsushi Abe
Kuni Ogawa
Masahiro Nishikawa
Satoshi Sekido
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6841579A priority Critical patent/JPS55159151A/en
Publication of JPS55159151A publication Critical patent/JPS55159151A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE: To detect components such as gas and steam with high sensitivity and measure temperature with good accuracy by so integrating the substrate partly formed with an ultrafine particle resistance film to one header as to be held in air by means of a wire.
CONSTITUTION: Combtooth-form electrodes 2, 3 of double construction of Cr and Au are provided on the surface of an insulation surface 1 and further an ultrafine particle resistance film 4 is provided thereon. When components such as gas and steam contact this film 4, its resistance value changes according to their densities and the components such as gas are electrically detected. The substrate 11 provided with the ultrafine particle resistance film is held by means of a Pt wire 18 to a post 17' within a metal package 14. When a heating coil 12 is let to evolve heat by supplying electric current thereto, the substrate 11 is heated, and this results in the faster detection speed of gas.
COPYRIGHT: (C)1980,JPO&Japio
JP6841579A 1979-05-31 1979-05-31 Detector Pending JPS55159151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6841579A JPS55159151A (en) 1979-05-31 1979-05-31 Detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6841579A JPS55159151A (en) 1979-05-31 1979-05-31 Detector

Publications (1)

Publication Number Publication Date
JPS55159151A true JPS55159151A (en) 1980-12-11

Family

ID=13373014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6841579A Pending JPS55159151A (en) 1979-05-31 1979-05-31 Detector

Country Status (1)

Country Link
JP (1) JPS55159151A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225857U (en) * 1988-08-05 1990-02-20
JP2002357581A (en) * 2001-05-31 2002-12-13 Ngk Spark Plug Co Ltd Humidity sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225857U (en) * 1988-08-05 1990-02-20
JP2002357581A (en) * 2001-05-31 2002-12-13 Ngk Spark Plug Co Ltd Humidity sensor

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