JPS55159151A - Detector - Google Patents
DetectorInfo
- Publication number
- JPS55159151A JPS55159151A JP6841579A JP6841579A JPS55159151A JP S55159151 A JPS55159151 A JP S55159151A JP 6841579 A JP6841579 A JP 6841579A JP 6841579 A JP6841579 A JP 6841579A JP S55159151 A JPS55159151 A JP S55159151A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- substrate
- ultrafine particle
- components
- resistance film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To detect components such as gas and steam with high sensitivity and measure temperature with good accuracy by so integrating the substrate partly formed with an ultrafine particle resistance film to one header as to be held in air by means of a wire.
CONSTITUTION: Combtooth-form electrodes 2, 3 of double construction of Cr and Au are provided on the surface of an insulation surface 1 and further an ultrafine particle resistance film 4 is provided thereon. When components such as gas and steam contact this film 4, its resistance value changes according to their densities and the components such as gas are electrically detected. The substrate 11 provided with the ultrafine particle resistance film is held by means of a Pt wire 18 to a post 17' within a metal package 14. When a heating coil 12 is let to evolve heat by supplying electric current thereto, the substrate 11 is heated, and this results in the faster detection speed of gas.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6841579A JPS55159151A (en) | 1979-05-31 | 1979-05-31 | Detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6841579A JPS55159151A (en) | 1979-05-31 | 1979-05-31 | Detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55159151A true JPS55159151A (en) | 1980-12-11 |
Family
ID=13373014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6841579A Pending JPS55159151A (en) | 1979-05-31 | 1979-05-31 | Detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55159151A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0225857U (en) * | 1988-08-05 | 1990-02-20 | ||
JP2002357581A (en) * | 2001-05-31 | 2002-12-13 | Ngk Spark Plug Co Ltd | Humidity sensor |
-
1979
- 1979-05-31 JP JP6841579A patent/JPS55159151A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0225857U (en) * | 1988-08-05 | 1990-02-20 | ||
JP2002357581A (en) * | 2001-05-31 | 2002-12-13 | Ngk Spark Plug Co Ltd | Humidity sensor |
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