JPS55158547A - Sensor - Google Patents

Sensor

Info

Publication number
JPS55158547A
JPS55158547A JP6645279A JP6645279A JPS55158547A JP S55158547 A JPS55158547 A JP S55158547A JP 6645279 A JP6645279 A JP 6645279A JP 6645279 A JP6645279 A JP 6645279A JP S55158547 A JPS55158547 A JP S55158547A
Authority
JP
Japan
Prior art keywords
film
extremely fine
smaller
particle
fine oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6645279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS612902B2 (enExample
Inventor
Masahiro Nishikawa
Kuni Ogawa
Atsushi Abe
Satoshi Sekido
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6645279A priority Critical patent/JPS55158547A/ja
Publication of JPS55158547A publication Critical patent/JPS55158547A/ja
Publication of JPS612902B2 publication Critical patent/JPS612902B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP6645279A 1979-05-29 1979-05-29 Sensor Granted JPS55158547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6645279A JPS55158547A (en) 1979-05-29 1979-05-29 Sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6645279A JPS55158547A (en) 1979-05-29 1979-05-29 Sensor

Publications (2)

Publication Number Publication Date
JPS55158547A true JPS55158547A (en) 1980-12-10
JPS612902B2 JPS612902B2 (enExample) 1986-01-28

Family

ID=13316170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6645279A Granted JPS55158547A (en) 1979-05-29 1979-05-29 Sensor

Country Status (1)

Country Link
JP (1) JPS55158547A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4535315A (en) * 1982-12-28 1985-08-13 New Cosmos Electric Co., Ltd. Alkane gas sensor comprising tin oxide semiconductor with large surface area

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4535315A (en) * 1982-12-28 1985-08-13 New Cosmos Electric Co., Ltd. Alkane gas sensor comprising tin oxide semiconductor with large surface area

Also Published As

Publication number Publication date
JPS612902B2 (enExample) 1986-01-28

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