JPS5265895A - Preparing multi-layer transparent conductive film - Google Patents

Preparing multi-layer transparent conductive film

Info

Publication number
JPS5265895A
JPS5265895A JP14212575A JP14212575A JPS5265895A JP S5265895 A JPS5265895 A JP S5265895A JP 14212575 A JP14212575 A JP 14212575A JP 14212575 A JP14212575 A JP 14212575A JP S5265895 A JPS5265895 A JP S5265895A
Authority
JP
Japan
Prior art keywords
conductive film
transparent conductive
layer transparent
preparing multi
system transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14212575A
Other languages
Japanese (ja)
Inventor
Yasuhiro Shimizu
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14212575A priority Critical patent/JPS5265895A/en
Publication of JPS5265895A publication Critical patent/JPS5265895A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prepare a feature that a conductivity of In2O3 system transparent conductive film be provided and the same chemical and mechanical resistance as SnO2 system transparent conductive film simultaneously provided, in manufacturing a multi-layer transparent conductive film consisting of In2O3 system transparent conductive film and SnO3 system transparent conductive film.
COPYRIGHT: (C)1977,JPO&Japio
JP14212575A 1975-11-27 1975-11-27 Preparing multi-layer transparent conductive film Pending JPS5265895A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14212575A JPS5265895A (en) 1975-11-27 1975-11-27 Preparing multi-layer transparent conductive film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14212575A JPS5265895A (en) 1975-11-27 1975-11-27 Preparing multi-layer transparent conductive film

Publications (1)

Publication Number Publication Date
JPS5265895A true JPS5265895A (en) 1977-05-31

Family

ID=15307955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14212575A Pending JPS5265895A (en) 1975-11-27 1975-11-27 Preparing multi-layer transparent conductive film

Country Status (1)

Country Link
JP (1) JPS5265895A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58218705A (en) * 1982-06-14 1983-12-20 株式会社半導体エネルギ−研究所 Method of producing low resistance transparent conductive film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58218705A (en) * 1982-06-14 1983-12-20 株式会社半導体エネルギ−研究所 Method of producing low resistance transparent conductive film
JPH0370329B2 (en) * 1982-06-14 1991-11-07 Handotai Energy Kenkyusho

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