JPS5515293A - Absolute pressure type pressure senser - Google Patents
Absolute pressure type pressure senserInfo
- Publication number
- JPS5515293A JPS5515293A JP8910778A JP8910778A JPS5515293A JP S5515293 A JPS5515293 A JP S5515293A JP 8910778 A JP8910778 A JP 8910778A JP 8910778 A JP8910778 A JP 8910778A JP S5515293 A JPS5515293 A JP S5515293A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- diaphragm
- seal
- standard pressure
- membrance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000012423 maintenance Methods 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8910778A JPS5515293A (en) | 1978-07-20 | 1978-07-20 | Absolute pressure type pressure senser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8910778A JPS5515293A (en) | 1978-07-20 | 1978-07-20 | Absolute pressure type pressure senser |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5515293A true JPS5515293A (en) | 1980-02-02 |
JPS6148794B2 JPS6148794B2 (enrdf_load_stackoverflow) | 1986-10-25 |
Family
ID=13961660
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8910778A Granted JPS5515293A (en) | 1978-07-20 | 1978-07-20 | Absolute pressure type pressure senser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5515293A (enrdf_load_stackoverflow) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5970522A (ja) * | 1982-10-15 | 1984-04-21 | Matsushita Electric Works Ltd | 二層押出成形方法 |
JPS61140934U (enrdf_load_stackoverflow) * | 1985-02-22 | 1986-09-01 | ||
JPS63110670A (ja) * | 1986-10-28 | 1988-05-16 | Nippon Denso Co Ltd | 静電接合方法および半導体圧力センサ |
US4806289A (en) * | 1987-01-16 | 1989-02-21 | The Dow Chemical Company | Method of making a hollow light pipe |
US4871487A (en) * | 1987-01-16 | 1989-10-03 | The Dow Chemical Company | Method of making a polymeric optical waveguide by coextrusion |
US5641445A (en) * | 1995-07-25 | 1997-06-24 | Cadillac Rubber & Plastics, Inc. | Apparatus and method for extruding multi-layered fuel tubing |
-
1978
- 1978-07-20 JP JP8910778A patent/JPS5515293A/ja active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5970522A (ja) * | 1982-10-15 | 1984-04-21 | Matsushita Electric Works Ltd | 二層押出成形方法 |
JPS61140934U (enrdf_load_stackoverflow) * | 1985-02-22 | 1986-09-01 | ||
JPS63110670A (ja) * | 1986-10-28 | 1988-05-16 | Nippon Denso Co Ltd | 静電接合方法および半導体圧力センサ |
US4806289A (en) * | 1987-01-16 | 1989-02-21 | The Dow Chemical Company | Method of making a hollow light pipe |
US4871487A (en) * | 1987-01-16 | 1989-10-03 | The Dow Chemical Company | Method of making a polymeric optical waveguide by coextrusion |
US5641445A (en) * | 1995-07-25 | 1997-06-24 | Cadillac Rubber & Plastics, Inc. | Apparatus and method for extruding multi-layered fuel tubing |
Also Published As
Publication number | Publication date |
---|---|
JPS6148794B2 (enrdf_load_stackoverflow) | 1986-10-25 |
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