JPS55151258A - Acoustic wave probe - Google Patents

Acoustic wave probe

Info

Publication number
JPS55151258A
JPS55151258A JP5814379A JP5814379A JPS55151258A JP S55151258 A JPS55151258 A JP S55151258A JP 5814379 A JP5814379 A JP 5814379A JP 5814379 A JP5814379 A JP 5814379A JP S55151258 A JPS55151258 A JP S55151258A
Authority
JP
Japan
Prior art keywords
crystal
acoustic
vapor
wave
simplify
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5814379A
Other languages
Japanese (ja)
Other versions
JPS6235064B2 (en
Inventor
Hiroshi Kanda
Kiyoshi Ishikawa
Toshiro Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5814379A priority Critical patent/JPS55151258A/en
Publication of JPS55151258A publication Critical patent/JPS55151258A/en
Publication of JPS6235064B2 publication Critical patent/JPS6235064B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

PURPOSE: To simplify the industrial production of acoustic-wave probes by reducing vapor-deposition processes while displaying perfect shield effect by making main crystal serve as an earth lower electrode and by using electrically conductive crystal as a conductive medium.
CONSTITUTION: Glassy carbon is used as a material which has propagation loss as small as that of quartz glass and is electically conductive. Column 110 is obtained by cutting a lump of this glassy carbon; and its one flank is optically polished and the other is given spherical concave hole 60 providing lens action. To a plate surface, piezoelectric thin film 20 such as zinc oxide is stuck direct by sputtering and on it, upper electrode 10 is vapor-deposited. Between upper electrode 10 and crystal 110 as a lower electrode, an RF electric signal is applied and an RF acoustic wave, plane wave, is radiated into crystal 110, so that it will focus on fixed focal point F. Thus, the perfect shield effect is displayed and vapor-deposition processes are reduced to simplify the industrial production of acoustic-wave probes.
COPYRIGHT: (C)1980,JPO&Japio
JP5814379A 1979-05-14 1979-05-14 Acoustic wave probe Granted JPS55151258A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5814379A JPS55151258A (en) 1979-05-14 1979-05-14 Acoustic wave probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5814379A JPS55151258A (en) 1979-05-14 1979-05-14 Acoustic wave probe

Publications (2)

Publication Number Publication Date
JPS55151258A true JPS55151258A (en) 1980-11-25
JPS6235064B2 JPS6235064B2 (en) 1987-07-30

Family

ID=13075761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5814379A Granted JPS55151258A (en) 1979-05-14 1979-05-14 Acoustic wave probe

Country Status (1)

Country Link
JP (1) JPS55151258A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997008546A1 (en) * 1995-08-31 1997-03-06 Alcan International Limited Ultrasonic probes for use in harsh environments
CN102252967A (en) * 2011-04-06 2011-11-23 天津大学 Piezoelectric detection device based on LSAW (laser surface acoustic wave) locating of PVDF (Polyvinylidene Fluoride) piezoelectric thin film
CN113959675A (en) * 2021-12-14 2022-01-21 中国空气动力研究与发展中心超高速空气动力研究所 Optical probe for identifying flow partition characteristics of acceleration section of expansion wind tunnel

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113601A (en) * 1975-03-07 1976-10-06 Varian Associates Acoustic focusing lens device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113601A (en) * 1975-03-07 1976-10-06 Varian Associates Acoustic focusing lens device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997008546A1 (en) * 1995-08-31 1997-03-06 Alcan International Limited Ultrasonic probes for use in harsh environments
CN102252967A (en) * 2011-04-06 2011-11-23 天津大学 Piezoelectric detection device based on LSAW (laser surface acoustic wave) locating of PVDF (Polyvinylidene Fluoride) piezoelectric thin film
CN113959675A (en) * 2021-12-14 2022-01-21 中国空气动力研究与发展中心超高速空气动力研究所 Optical probe for identifying flow partition characteristics of acceleration section of expansion wind tunnel

Also Published As

Publication number Publication date
JPS6235064B2 (en) 1987-07-30

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