JPS5514651A - Multibeam-single electron gun - Google Patents
Multibeam-single electron gunInfo
- Publication number
- JPS5514651A JPS5514651A JP8700678A JP8700678A JPS5514651A JP S5514651 A JPS5514651 A JP S5514651A JP 8700678 A JP8700678 A JP 8700678A JP 8700678 A JP8700678 A JP 8700678A JP S5514651 A JPS5514651 A JP S5514651A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- hole part
- lens
- diameter
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce spherical aberration and improve astigmatic and image curvature aberration by fitting a small diametrical through hole part near the center of a focusing electrode axis in a unipotential electron lens.
CONSTITUTION: The main electron lens is formed by an equal diametrical unipotential main lens. High voltage of tenWscores of kilovolts is impressed on electrodes G3, G5 and a focus voltage far low than that is given to an electrode G4. Around the center of the axial direction of the focusing electrode is equipped a through hole part a which does not disturb beams BR, BC, BB by their passage and has a diameter D smaller than the internal diameter of the electrode G, viz. the diameter d of the lens. This through hole part a is formed by an electrically connected electrode plate in a solid or separate structure to the electrode G4.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8700678A JPS5514651A (en) | 1978-07-17 | 1978-07-17 | Multibeam-single electron gun |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8700678A JPS5514651A (en) | 1978-07-17 | 1978-07-17 | Multibeam-single electron gun |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5514651A true JPS5514651A (en) | 1980-02-01 |
Family
ID=13902829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8700678A Pending JPS5514651A (en) | 1978-07-17 | 1978-07-17 | Multibeam-single electron gun |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5514651A (en) |
-
1978
- 1978-07-17 JP JP8700678A patent/JPS5514651A/en active Pending
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