JPS5514651A - Multibeam-single electron gun - Google Patents

Multibeam-single electron gun

Info

Publication number
JPS5514651A
JPS5514651A JP8700678A JP8700678A JPS5514651A JP S5514651 A JPS5514651 A JP S5514651A JP 8700678 A JP8700678 A JP 8700678A JP 8700678 A JP8700678 A JP 8700678A JP S5514651 A JPS5514651 A JP S5514651A
Authority
JP
Japan
Prior art keywords
electrode
hole part
lens
diameter
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8700678A
Other languages
Japanese (ja)
Inventor
Tsunenari Saito
Takeo Kaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP8700678A priority Critical patent/JPS5514651A/en
Publication of JPS5514651A publication Critical patent/JPS5514651A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce spherical aberration and improve astigmatic and image curvature aberration by fitting a small diametrical through hole part near the center of a focusing electrode axis in a unipotential electron lens.
CONSTITUTION: The main electron lens is formed by an equal diametrical unipotential main lens. High voltage of tenWscores of kilovolts is impressed on electrodes G3, G5 and a focus voltage far low than that is given to an electrode G4. Around the center of the axial direction of the focusing electrode is equipped a through hole part a which does not disturb beams BR, BC, BB by their passage and has a diameter D smaller than the internal diameter of the electrode G, viz. the diameter d of the lens. This through hole part a is formed by an electrically connected electrode plate in a solid or separate structure to the electrode G4.
COPYRIGHT: (C)1980,JPO&Japio
JP8700678A 1978-07-17 1978-07-17 Multibeam-single electron gun Pending JPS5514651A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8700678A JPS5514651A (en) 1978-07-17 1978-07-17 Multibeam-single electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8700678A JPS5514651A (en) 1978-07-17 1978-07-17 Multibeam-single electron gun

Publications (1)

Publication Number Publication Date
JPS5514651A true JPS5514651A (en) 1980-02-01

Family

ID=13902829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8700678A Pending JPS5514651A (en) 1978-07-17 1978-07-17 Multibeam-single electron gun

Country Status (1)

Country Link
JP (1) JPS5514651A (en)

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