JPS55142307A - Optical axis position correcting device - Google Patents

Optical axis position correcting device

Info

Publication number
JPS55142307A
JPS55142307A JP5117779A JP5117779A JPS55142307A JP S55142307 A JPS55142307 A JP S55142307A JP 5117779 A JP5117779 A JP 5117779A JP 5117779 A JP5117779 A JP 5117779A JP S55142307 A JPS55142307 A JP S55142307A
Authority
JP
Japan
Prior art keywords
optical axis
light
position detecting
output
passes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5117779A
Other languages
English (en)
Other versions
JPS6119003B2 (ja
Inventor
Yoshikazu Goto
Sadao Mizuno
Masahiro Deguchi
Mitsuro Moriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5117779A priority Critical patent/JPS55142307A/ja
Publication of JPS55142307A publication Critical patent/JPS55142307A/ja
Publication of JPS6119003B2 publication Critical patent/JPS6119003B2/ja
Granted legal-status Critical Current

Links

JP5117779A 1979-04-24 1979-04-24 Optical axis position correcting device Granted JPS55142307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5117779A JPS55142307A (en) 1979-04-24 1979-04-24 Optical axis position correcting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5117779A JPS55142307A (en) 1979-04-24 1979-04-24 Optical axis position correcting device

Publications (2)

Publication Number Publication Date
JPS55142307A true JPS55142307A (en) 1980-11-06
JPS6119003B2 JPS6119003B2 (ja) 1986-05-15

Family

ID=12879551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5117779A Granted JPS55142307A (en) 1979-04-24 1979-04-24 Optical axis position correcting device

Country Status (1)

Country Link
JP (1) JPS55142307A (ja)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166916A (ja) * 1984-02-10 1985-08-30 Hitachi Ltd 光走査装置
JPS62220838A (ja) * 1986-03-20 1987-09-29 Hitachi Electronics Eng Co Ltd 表面検査装置
JPS62251717A (ja) * 1986-04-25 1987-11-02 Hitachi Ltd レ−ザビ−ム方向補正装置
JPS63100420A (ja) * 1986-10-17 1988-05-02 Nippon Laser:Kk 光分割光学装置
JPH02289816A (ja) * 1989-02-02 1990-11-29 Ricoh Co Ltd 画像形成装置
JPH0386924A (ja) * 1989-08-29 1991-04-11 Asahi Optical Co Ltd 光学式情報記録再生装置用光学系の光軸調整機構
JPH03139672A (ja) * 1989-10-13 1991-06-13 Xerox Corp ビーム変調用モジュレータ
JPH03144519A (ja) * 1989-10-13 1991-06-19 Xerox Corp ビーム変調装置
JPH03163609A (ja) * 1989-11-22 1991-07-15 Agency Of Ind Science & Technol 光空間伝送システムのデュアルサーボ制御装置
JPH04282414A (ja) * 1991-03-12 1992-10-07 Hitachi Zosen Corp レーザビームの位置および角度制御装置
JPH05107485A (ja) * 1991-10-18 1993-04-30 Nippon Telegr & Teleph Corp <Ntt> 光接続モジユール
JP2006239092A (ja) * 2005-03-02 2006-09-14 Nidek Co Ltd 角膜手術装置
JP2010123700A (ja) * 2008-11-19 2010-06-03 Hitachi High-Technologies Corp 検査装置
WO2015118687A1 (ja) * 2014-02-10 2015-08-13 ギガフォトン株式会社 レーザ装置及び極端紫外光生成システム
JP2019135788A (ja) * 2019-04-22 2019-08-15 ギガフォトン株式会社 レーザ装置及び極端紫外光生成システム

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166916A (ja) * 1984-02-10 1985-08-30 Hitachi Ltd 光走査装置
JPS62220838A (ja) * 1986-03-20 1987-09-29 Hitachi Electronics Eng Co Ltd 表面検査装置
JPS62251717A (ja) * 1986-04-25 1987-11-02 Hitachi Ltd レ−ザビ−ム方向補正装置
JPS63100420A (ja) * 1986-10-17 1988-05-02 Nippon Laser:Kk 光分割光学装置
JPH02289816A (ja) * 1989-02-02 1990-11-29 Ricoh Co Ltd 画像形成装置
JPH0386924A (ja) * 1989-08-29 1991-04-11 Asahi Optical Co Ltd 光学式情報記録再生装置用光学系の光軸調整機構
JPH03139672A (ja) * 1989-10-13 1991-06-13 Xerox Corp ビーム変調用モジュレータ
JPH03144519A (ja) * 1989-10-13 1991-06-19 Xerox Corp ビーム変調装置
JPH03163609A (ja) * 1989-11-22 1991-07-15 Agency Of Ind Science & Technol 光空間伝送システムのデュアルサーボ制御装置
JPH04282414A (ja) * 1991-03-12 1992-10-07 Hitachi Zosen Corp レーザビームの位置および角度制御装置
JPH05107485A (ja) * 1991-10-18 1993-04-30 Nippon Telegr & Teleph Corp <Ntt> 光接続モジユール
JP2006239092A (ja) * 2005-03-02 2006-09-14 Nidek Co Ltd 角膜手術装置
JP4708050B2 (ja) * 2005-03-02 2011-06-22 株式会社ニデック 角膜手術装置
JP2010123700A (ja) * 2008-11-19 2010-06-03 Hitachi High-Technologies Corp 検査装置
WO2015118687A1 (ja) * 2014-02-10 2015-08-13 ギガフォトン株式会社 レーザ装置及び極端紫外光生成システム
JPWO2015118687A1 (ja) * 2014-02-10 2017-03-23 ギガフォトン株式会社 レーザ装置及び極端紫外光生成システム
US9743503B2 (en) 2014-02-10 2017-08-22 Gigaphoton Inc. Laser device and extreme ultraviolet light generation system
JP2019135788A (ja) * 2019-04-22 2019-08-15 ギガフォトン株式会社 レーザ装置及び極端紫外光生成システム

Also Published As

Publication number Publication date
JPS6119003B2 (ja) 1986-05-15

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