JPS55136918A - Aberration correcting recess diffraction grating - Google Patents

Aberration correcting recess diffraction grating

Info

Publication number
JPS55136918A
JPS55136918A JP4415279A JP4415279A JPS55136918A JP S55136918 A JPS55136918 A JP S55136918A JP 4415279 A JP4415279 A JP 4415279A JP 4415279 A JP4415279 A JP 4415279A JP S55136918 A JPS55136918 A JP S55136918A
Authority
JP
Japan
Prior art keywords
grating
recess
diffraction grating
diffraction
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4415279A
Other languages
English (en)
Other versions
JPS6219691B2 (ja
Inventor
Tatsuo Harada
Toshiaki Kita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4415279A priority Critical patent/JPS55136918A/ja
Priority to US06/139,549 priority patent/US4312569A/en
Publication of JPS55136918A publication Critical patent/JPS55136918A/ja
Publication of JPS6219691B2 publication Critical patent/JPS6219691B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
JP4415279A 1979-04-13 1979-04-13 Aberration correcting recess diffraction grating Granted JPS55136918A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4415279A JPS55136918A (en) 1979-04-13 1979-04-13 Aberration correcting recess diffraction grating
US06/139,549 US4312569A (en) 1979-04-13 1980-04-11 Concave gratings

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4415279A JPS55136918A (en) 1979-04-13 1979-04-13 Aberration correcting recess diffraction grating

Publications (2)

Publication Number Publication Date
JPS55136918A true JPS55136918A (en) 1980-10-25
JPS6219691B2 JPS6219691B2 (ja) 1987-04-30

Family

ID=12683649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4415279A Granted JPS55136918A (en) 1979-04-13 1979-04-13 Aberration correcting recess diffraction grating

Country Status (2)

Country Link
US (1) US4312569A (ja)
JP (1) JPS55136918A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04501472A (ja) * 1989-08-10 1992-03-12 ヘトリック、マイケル・シー 変動間隔回折格子および焦点ずれのないモノクロメータ

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026905A (ja) * 1983-07-25 1985-02-09 Hitachi Ltd 球面ホログラムレンズ
US4776696A (en) * 1987-03-20 1988-10-11 Michael C. Hettrick Optical system for high resolution spectrometer/monochromator
US4798446A (en) * 1987-09-14 1989-01-17 The United States Of America As Represented By The United States Department Of Energy Aplanatic and quasi-aplanatic diffraction gratings
US5274435A (en) * 1992-02-26 1993-12-28 Hettrick Michael C Grating monochromators and spectrometers based on surface normal rotation
US5995221A (en) 1997-02-28 1999-11-30 Instruments S.A., Inc. Modified concentric spectrograph
JP2002329473A (ja) * 2001-02-27 2002-11-15 Jeol Ltd Ｘ線分光器を備えた透過型電子顕微鏡
CN100480622C (zh) * 2006-06-02 2009-04-22 中国科学院长春光学精密机械与物理研究所 凹面光栅制作光路中测量波源点与毛坯中心点距离的方法
WO2010048073A2 (en) * 2008-10-20 2010-04-29 Ningbo Yuanlu Electro-Optics, Co., Ltd. Spectrometers with aberration-corrected concave diffraction gratings and transmissive aberration correctors
JP6234667B2 (ja) * 2012-08-06 2017-11-22 浜松ホトニクス株式会社 光学素子及びその製造方法
TWI627449B (zh) * 2016-04-15 2018-06-21 中央研究院 曲面繞射光柵、光譜儀及曲面繞射光柵製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49134346A (ja) * 1973-04-25 1974-12-24
JPS5344044A (en) * 1976-10-02 1978-04-20 Nippon Chemical Ind Device for forming holographic plane diffraction grating

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4012843A (en) * 1973-04-25 1977-03-22 Hitachi, Ltd. Concave diffraction grating and a manufacturing method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49134346A (ja) * 1973-04-25 1974-12-24
JPS5344044A (en) * 1976-10-02 1978-04-20 Nippon Chemical Ind Device for forming holographic plane diffraction grating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04501472A (ja) * 1989-08-10 1992-03-12 ヘトリック、マイケル・シー 変動間隔回折格子および焦点ずれのないモノクロメータ

Also Published As

Publication number Publication date
US4312569A (en) 1982-01-26
JPS6219691B2 (ja) 1987-04-30

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