JPS55134851A - Mask purifier - Google Patents

Mask purifier

Info

Publication number
JPS55134851A
JPS55134851A JP4274079A JP4274079A JPS55134851A JP S55134851 A JPS55134851 A JP S55134851A JP 4274079 A JP4274079 A JP 4274079A JP 4274079 A JP4274079 A JP 4274079A JP S55134851 A JPS55134851 A JP S55134851A
Authority
JP
Japan
Prior art keywords
plate
purifier
evacuated
nozzles
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4274079A
Other languages
Japanese (ja)
Other versions
JPS6136221B2 (en
Inventor
Takao Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4274079A priority Critical patent/JPS55134851A/en
Publication of JPS55134851A publication Critical patent/JPS55134851A/en
Publication of JPS6136221B2 publication Critical patent/JPS6136221B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE:To perform perfect purification and enhance the quality of a photomask by removing dust attached to a dry plate or a blank plate for forming a pattern at a state where the plate is isolated from the outside. CONSTITUTION:The space formed with dry plate holders 2 and the inner wall of lid-shape structure 6 of the mask purifier is evacuated through exhaust ports 11 made in the wall. While slowly rotating nozzle group section 8 at this state in a fixed direction, nitrogen gas mixed with ozone by ionizer 9 is sprayed from nozzles 10 at a right angle to dry plate 1 under predetermined pressure to blow away dust on plate 1, and the sut-containing gas is exhausted from ports 11 of the purifier. Section 8 is then evacuated to a vacuum through rotary shaft 7 to allow dust adhered to plate 1 to float by suction through nozzles 10. By alternately repeating the nitrogen spraying and the evacuation several times for about 10 sec plate 1 is purified perfectly.
JP4274079A 1979-04-09 1979-04-09 Mask purifier Granted JPS55134851A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4274079A JPS55134851A (en) 1979-04-09 1979-04-09 Mask purifier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4274079A JPS55134851A (en) 1979-04-09 1979-04-09 Mask purifier

Publications (2)

Publication Number Publication Date
JPS55134851A true JPS55134851A (en) 1980-10-21
JPS6136221B2 JPS6136221B2 (en) 1986-08-16

Family

ID=12644412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4274079A Granted JPS55134851A (en) 1979-04-09 1979-04-09 Mask purifier

Country Status (1)

Country Link
JP (1) JPS55134851A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60231330A (en) * 1984-04-28 1985-11-16 Seiichiro Sogo Semiconductor material processing apparatus
JPS61170034A (en) * 1985-01-23 1986-07-31 Hitachi Ltd Cleaning device
JP2007125473A (en) * 2005-11-01 2007-05-24 Ricoh Co Ltd Cleaning device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60231330A (en) * 1984-04-28 1985-11-16 Seiichiro Sogo Semiconductor material processing apparatus
JPS61170034A (en) * 1985-01-23 1986-07-31 Hitachi Ltd Cleaning device
JP2007125473A (en) * 2005-11-01 2007-05-24 Ricoh Co Ltd Cleaning device

Also Published As

Publication number Publication date
JPS6136221B2 (en) 1986-08-16

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