JPS55133004A - Production of nonplane diffraction grating - Google Patents

Production of nonplane diffraction grating

Info

Publication number
JPS55133004A
JPS55133004A JP4051779A JP4051779A JPS55133004A JP S55133004 A JPS55133004 A JP S55133004A JP 4051779 A JP4051779 A JP 4051779A JP 4051779 A JP4051779 A JP 4051779A JP S55133004 A JPS55133004 A JP S55133004A
Authority
JP
Japan
Prior art keywords
nonplane
grating
diffraction grating
plane
base body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4051779A
Other languages
Japanese (ja)
Inventor
Yoji Fujii
Junichiro Minowa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP4051779A priority Critical patent/JPS55133004A/en
Priority to DE7979102442T priority patent/DE2965192D1/en
Priority to DE8282100228T priority patent/DE2967536D1/en
Priority to EP82100228A priority patent/EP0059304B1/en
Priority to EP79102442A priority patent/EP0007108B1/en
Priority to CA331,934A priority patent/CA1113752A/en
Priority to US06/058,382 priority patent/US4330175A/en
Publication of JPS55133004A publication Critical patent/JPS55133004A/en
Priority to US06/325,721 priority patent/US4405405A/en
Pending legal-status Critical Current

Links

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

PURPOSE: To readily and surely manufacture the nonplane diffraction grating by etching the silicon single crystal base body whose etching rate is aniostropic to the crystal faces to form the plane grating of the specified section and suction-affixing the same on a nonplane base body.
CONSTITUTION: When masks 14 are provided at every required pitch of the plane 21 of the silicon single crystal base body 24 formed by the main plane 21, side plane 23, etc. When this base body is etched, the plane diffraction grating form body 28 whose section is of an inverted triangle shape because of the etching rate being anisotropic to the crystal planes and which is provided with the grooves 27... for grating of inner side faces 26L, 26R is formed. This grating form body 28 is placed on a base body 50 for supporting the nonplane diffraction grating set on the base table 40 connected to an exhaust means 42 and is bonded by means of vacuum suction and adhesive agent, whereby the nonplane diffraction grating is readily and surely manufactured without using any precision grating groove die, etc.
COPYRIGHT: (C)1980,JPO&Japio
JP4051779A 1978-07-18 1979-04-04 Production of nonplane diffraction grating Pending JPS55133004A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP4051779A JPS55133004A (en) 1979-04-04 1979-04-04 Production of nonplane diffraction grating
DE7979102442T DE2965192D1 (en) 1978-07-18 1979-07-16 A method of manufacturing a diffraction grating structure
DE8282100228T DE2967536D1 (en) 1978-07-18 1979-07-16 A method of manufacturing a curved diffraction grating structure
EP82100228A EP0059304B1 (en) 1978-07-18 1979-07-16 A method of manufacturing a curved diffraction grating structure
EP79102442A EP0007108B1 (en) 1978-07-18 1979-07-16 A method of manufacturing a diffraction grating structure
CA331,934A CA1113752A (en) 1978-07-18 1979-07-17 Blazed diffraction grating structures and method of manufacturing the same
US06/058,382 US4330175A (en) 1978-07-18 1979-07-17 Blazed diffraction grating structures and method of manufacturing the same
US06/325,721 US4405405A (en) 1978-07-18 1981-11-30 Blazed diffraction grating structures and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4051779A JPS55133004A (en) 1979-04-04 1979-04-04 Production of nonplane diffraction grating

Publications (1)

Publication Number Publication Date
JPS55133004A true JPS55133004A (en) 1980-10-16

Family

ID=12582701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4051779A Pending JPS55133004A (en) 1978-07-18 1979-04-04 Production of nonplane diffraction grating

Country Status (1)

Country Link
JP (1) JPS55133004A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013183601A1 (en) * 2012-06-08 2013-12-12 株式会社日立ハイテクノロジーズ Curved face diffraction grating fabrication method, curved face diffraction grating cast, and curved face diffraction grating employing same
WO2014148118A1 (en) * 2013-03-19 2014-09-25 株式会社日立ハイテクノロジーズ Curved diffraction grating, production method therefor, and optical device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013183601A1 (en) * 2012-06-08 2013-12-12 株式会社日立ハイテクノロジーズ Curved face diffraction grating fabrication method, curved face diffraction grating cast, and curved face diffraction grating employing same
JP2014013366A (en) * 2012-06-08 2014-01-23 Hitachi High-Technologies Corp Manufacturing method for curved diffraction grating, mold for curved diffraction grating, and curved diffraction grating using the same
CN104335082A (en) * 2012-06-08 2015-02-04 株式会社日立高新技术 Curved face diffraction grating fabrication method, curved face diffraction grating cast, and curved face diffraction grating employing same
US9709714B2 (en) 2012-06-08 2017-07-18 Hitachi High-Technologies Corporation Curved face diffraction grating fabrication method, curved face diffraction grating cast, and curved face diffraction grating employing same
WO2014148118A1 (en) * 2013-03-19 2014-09-25 株式会社日立ハイテクノロジーズ Curved diffraction grating, production method therefor, and optical device
JP2014182301A (en) * 2013-03-19 2014-09-29 Hitachi High-Technologies Corp Curved diffraction grating and manufacturing method of the same, and optical device
US9945993B2 (en) 2013-03-19 2018-04-17 Hitachi High-Technologies Corporation Curved grating, method for manufacturing the same, and optical device

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