JPS55129303A - Thin film photo branching and photodetector - Google Patents

Thin film photo branching and photodetector

Info

Publication number
JPS55129303A
JPS55129303A JP3546279A JP3546279A JPS55129303A JP S55129303 A JPS55129303 A JP S55129303A JP 3546279 A JP3546279 A JP 3546279A JP 3546279 A JP3546279 A JP 3546279A JP S55129303 A JPS55129303 A JP S55129303A
Authority
JP
Japan
Prior art keywords
light
thin film
diffracted
grooves
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3546279A
Other languages
Japanese (ja)
Inventor
Michiharu Nakamura
Kaoru Fukuzawa
Junichi Umeda
Shigeo Yamashita
Akimasa Onozato
Hitoshi Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3546279A priority Critical patent/JPS55129303A/en
Publication of JPS55129303A publication Critical patent/JPS55129303A/en
Pending legal-status Critical Current

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  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To provide the thin film photo branching and photodetector which is adaptable to optical communication systems by such things as provision of two insulation layers, periodic undulations of irregular periods and a plurality of photo- detectors to the specified portions of the main semiconductor surface. CONSTITUTION:A diffraction grating 5 is formed on the surface of the thin film optical guide provided on a silicon substrate 6, in such a manner that the periods of its grooves change monotonously in the Z direction, the change in their period being shorter with the incident side periods. Now, when light 1 enters at an angle of alpha to the grooves of the diffraction grating, it is diffracted with good efficiency at the specified points associated to the wavelength of the light and the effective refractive index of the optical guide, but the period of the grooves of the diffraction grating 5 has a monotonous change in the Z direction and therefore the light of different wavelengths are diffracted at each place and the light of the wavelengths lambda1-lambda3 is diffracted to the positions 2-4, the photodetectors 11-13 corresponded thereto are integrated and disposed monolithically on the single substrate 6 and when the light 1 multiplexed from the light of the wavelengths lambda1-lambda3 enters, each light is branched, thus the photo detections may be accomplished simultaneously.
JP3546279A 1979-03-28 1979-03-28 Thin film photo branching and photodetector Pending JPS55129303A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3546279A JPS55129303A (en) 1979-03-28 1979-03-28 Thin film photo branching and photodetector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3546279A JPS55129303A (en) 1979-03-28 1979-03-28 Thin film photo branching and photodetector

Publications (1)

Publication Number Publication Date
JPS55129303A true JPS55129303A (en) 1980-10-07

Family

ID=12442445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3546279A Pending JPS55129303A (en) 1979-03-28 1979-03-28 Thin film photo branching and photodetector

Country Status (1)

Country Link
JP (1) JPS55129303A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767907A (en) * 1980-10-15 1982-04-24 Sumitomo Electric Ind Ltd Photoelectric conversion connector
JPS5965809A (en) * 1982-09-03 1984-04-14 リツエンツイア・パテント−フエルヴアルツングス−ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Electrooptic transmitter and/or optical coupler for connect-ing for electro-optic transmitter and/or optoelectronic receiver to light wave guide depending on wavelengh
JPS59121307A (en) * 1982-12-21 1984-07-13 Fujitsu Ltd Optical monitoring system
JPS61163303A (en) * 1985-01-07 1986-07-24 シーメンス、アクチエンゲゼルシヤフト Integrated wdm demultiplex module and making thereof
JPS61284705A (en) * 1985-06-12 1986-12-15 Hitachi Ltd Optical multiplexer and demultiplexer
JPS6333709A (en) * 1986-07-28 1988-02-13 Nippon Telegr & Teleph Corp <Ntt> Wavelength multiple optical accessor
JPH01113707A (en) * 1987-10-27 1989-05-02 Hiroshi Nishihara Wavelength multiplexer/demultiplexer with light condensing function

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3814498A (en) * 1972-05-04 1974-06-04 Bell Telephone Labor Inc Integrated optical circuit devices employing optical gratings
JPS5014360A (en) * 1973-04-20 1975-02-14

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3814498A (en) * 1972-05-04 1974-06-04 Bell Telephone Labor Inc Integrated optical circuit devices employing optical gratings
JPS5014360A (en) * 1973-04-20 1975-02-14

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767907A (en) * 1980-10-15 1982-04-24 Sumitomo Electric Ind Ltd Photoelectric conversion connector
JPS5965809A (en) * 1982-09-03 1984-04-14 リツエンツイア・パテント−フエルヴアルツングス−ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Electrooptic transmitter and/or optical coupler for connect-ing for electro-optic transmitter and/or optoelectronic receiver to light wave guide depending on wavelengh
JPH0541963B2 (en) * 1982-09-03 1993-06-25 Licentia Gmbh
JPS59121307A (en) * 1982-12-21 1984-07-13 Fujitsu Ltd Optical monitoring system
JPS61163303A (en) * 1985-01-07 1986-07-24 シーメンス、アクチエンゲゼルシヤフト Integrated wdm demultiplex module and making thereof
JPS61284705A (en) * 1985-06-12 1986-12-15 Hitachi Ltd Optical multiplexer and demultiplexer
JPS6333709A (en) * 1986-07-28 1988-02-13 Nippon Telegr & Teleph Corp <Ntt> Wavelength multiple optical accessor
JPH01113707A (en) * 1987-10-27 1989-05-02 Hiroshi Nishihara Wavelength multiplexer/demultiplexer with light condensing function

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