JPS55128579A - Vacuum deposition apparatus - Google Patents

Vacuum deposition apparatus

Info

Publication number
JPS55128579A
JPS55128579A JP3429479A JP3429479A JPS55128579A JP S55128579 A JPS55128579 A JP S55128579A JP 3429479 A JP3429479 A JP 3429479A JP 3429479 A JP3429479 A JP 3429479A JP S55128579 A JPS55128579 A JP S55128579A
Authority
JP
Japan
Prior art keywords
hearth
deposited
dome
chemical
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3429479A
Other languages
English (en)
Inventor
Osamu Kamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP3429479A priority Critical patent/JPS55128579A/ja
Publication of JPS55128579A publication Critical patent/JPS55128579A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP3429479A 1979-03-26 1979-03-26 Vacuum deposition apparatus Pending JPS55128579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3429479A JPS55128579A (en) 1979-03-26 1979-03-26 Vacuum deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3429479A JPS55128579A (en) 1979-03-26 1979-03-26 Vacuum deposition apparatus

Publications (1)

Publication Number Publication Date
JPS55128579A true JPS55128579A (en) 1980-10-04

Family

ID=12410130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3429479A Pending JPS55128579A (en) 1979-03-26 1979-03-26 Vacuum deposition apparatus

Country Status (1)

Country Link
JP (1) JPS55128579A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH042764A (ja) * 1990-04-18 1992-01-07 Sharp Corp 薄膜ｅｌ素子の製造方法
JPH05339712A (ja) * 1992-06-09 1993-12-21 Mitsubishi Electric Corp 成膜装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH042764A (ja) * 1990-04-18 1992-01-07 Sharp Corp 薄膜ｅｌ素子の製造方法
JPH05339712A (ja) * 1992-06-09 1993-12-21 Mitsubishi Electric Corp 成膜装置

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