JPS55120003A - Reflecting mirror for laser guide - Google Patents

Reflecting mirror for laser guide

Info

Publication number
JPS55120003A
JPS55120003A JP2718479A JP2718479A JPS55120003A JP S55120003 A JPS55120003 A JP S55120003A JP 2718479 A JP2718479 A JP 2718479A JP 2718479 A JP2718479 A JP 2718479A JP S55120003 A JPS55120003 A JP S55120003A
Authority
JP
Japan
Prior art keywords
titanium
titanium alloy
reflecting mirror
mirror
reliability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2718479A
Other languages
Japanese (ja)
Inventor
Minoru Yokota
Kazuhito Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP2718479A priority Critical patent/JPS55120003A/en
Publication of JPS55120003A publication Critical patent/JPS55120003A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a lightweight reflecting mirror for a laser guide free from a reflectance deterioration over a long term and having high safety and reliability by using titanium or a titanium alloy with high corrosion resistance and strength as a substrate for reflection.
CONSTITUTION: This mirror is composed of surface polished reflecting mirror substrate 1 made of titanium or titanium alloy and of gold or silver covering layer 2 for reflection formed by vacuum deposition, ion plating or sputtering. The titanium is pure titanium with a purity of 99% or more, and the titanium alloy consists of less than 10% in total of one or more kinds of elements selected from manganese, chromium, aluminum, iron, tin and molybdenum, and the balance titanium and impurities. Since titanium or a titanium alloy has high corrosion resistance, it undergoes little reflectance deterioration. The low specific gravity results in light weight, and high strength is obtained esp. by alloying. Thus, this mirror is provided with high safety and reliability.
COPYRIGHT: (C)1980,JPO&Japio
JP2718479A 1979-03-07 1979-03-07 Reflecting mirror for laser guide Pending JPS55120003A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2718479A JPS55120003A (en) 1979-03-07 1979-03-07 Reflecting mirror for laser guide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2718479A JPS55120003A (en) 1979-03-07 1979-03-07 Reflecting mirror for laser guide

Publications (1)

Publication Number Publication Date
JPS55120003A true JPS55120003A (en) 1980-09-16

Family

ID=12213983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2718479A Pending JPS55120003A (en) 1979-03-07 1979-03-07 Reflecting mirror for laser guide

Country Status (1)

Country Link
JP (1) JPS55120003A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1088650A1 (en) * 1998-06-17 2001-04-04 Showa Co., Ltd. Antifouling member and process for producing the same
EP1369744A1 (en) * 2002-06-06 2003-12-10 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2006243044A (en) * 2005-02-28 2006-09-14 Central Res Inst Of Electric Power Ind Multifunctional material having mirror finished surface
US7405031B2 (en) 2002-06-06 2008-07-29 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
EP2454571B1 (en) * 2009-07-15 2017-08-30 Innovative Sensor Technology IST AG Sensor element for determining at least one physical measurement variable

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1088650A1 (en) * 1998-06-17 2001-04-04 Showa Co., Ltd. Antifouling member and process for producing the same
EP1088650A4 (en) * 1998-06-17 2003-09-03 Showa Co Ltd Antifouling member and process for producing the same
EP1369744A1 (en) * 2002-06-06 2003-12-10 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
US7405031B2 (en) 2002-06-06 2008-07-29 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2006243044A (en) * 2005-02-28 2006-09-14 Central Res Inst Of Electric Power Ind Multifunctional material having mirror finished surface
EP2454571B1 (en) * 2009-07-15 2017-08-30 Innovative Sensor Technology IST AG Sensor element for determining at least one physical measurement variable

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