JPS55120003A - Reflecting mirror for laser guide - Google Patents
Reflecting mirror for laser guideInfo
- Publication number
- JPS55120003A JPS55120003A JP2718479A JP2718479A JPS55120003A JP S55120003 A JPS55120003 A JP S55120003A JP 2718479 A JP2718479 A JP 2718479A JP 2718479 A JP2718479 A JP 2718479A JP S55120003 A JPS55120003 A JP S55120003A
- Authority
- JP
- Japan
- Prior art keywords
- titanium
- titanium alloy
- reflecting mirror
- mirror
- reliability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a lightweight reflecting mirror for a laser guide free from a reflectance deterioration over a long term and having high safety and reliability by using titanium or a titanium alloy with high corrosion resistance and strength as a substrate for reflection.
CONSTITUTION: This mirror is composed of surface polished reflecting mirror substrate 1 made of titanium or titanium alloy and of gold or silver covering layer 2 for reflection formed by vacuum deposition, ion plating or sputtering. The titanium is pure titanium with a purity of 99% or more, and the titanium alloy consists of less than 10% in total of one or more kinds of elements selected from manganese, chromium, aluminum, iron, tin and molybdenum, and the balance titanium and impurities. Since titanium or a titanium alloy has high corrosion resistance, it undergoes little reflectance deterioration. The low specific gravity results in light weight, and high strength is obtained esp. by alloying. Thus, this mirror is provided with high safety and reliability.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2718479A JPS55120003A (en) | 1979-03-07 | 1979-03-07 | Reflecting mirror for laser guide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2718479A JPS55120003A (en) | 1979-03-07 | 1979-03-07 | Reflecting mirror for laser guide |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55120003A true JPS55120003A (en) | 1980-09-16 |
Family
ID=12213983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2718479A Pending JPS55120003A (en) | 1979-03-07 | 1979-03-07 | Reflecting mirror for laser guide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55120003A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1088650A1 (en) * | 1998-06-17 | 2001-04-04 | Showa Co., Ltd. | Antifouling member and process for producing the same |
EP1369744A1 (en) * | 2002-06-06 | 2003-12-10 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2006243044A (en) * | 2005-02-28 | 2006-09-14 | Central Res Inst Of Electric Power Ind | Multifunctional material having mirror finished surface |
US7405031B2 (en) | 2002-06-06 | 2008-07-29 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP2454571B1 (en) * | 2009-07-15 | 2017-08-30 | Innovative Sensor Technology IST AG | Sensor element for determining at least one physical measurement variable |
-
1979
- 1979-03-07 JP JP2718479A patent/JPS55120003A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1088650A1 (en) * | 1998-06-17 | 2001-04-04 | Showa Co., Ltd. | Antifouling member and process for producing the same |
EP1088650A4 (en) * | 1998-06-17 | 2003-09-03 | Showa Co Ltd | Antifouling member and process for producing the same |
EP1369744A1 (en) * | 2002-06-06 | 2003-12-10 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7405031B2 (en) | 2002-06-06 | 2008-07-29 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2006243044A (en) * | 2005-02-28 | 2006-09-14 | Central Res Inst Of Electric Power Ind | Multifunctional material having mirror finished surface |
EP2454571B1 (en) * | 2009-07-15 | 2017-08-30 | Innovative Sensor Technology IST AG | Sensor element for determining at least one physical measurement variable |
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