JPS55117985A - Ion beam quantity measuring unit - Google Patents

Ion beam quantity measuring unit

Info

Publication number
JPS55117985A
JPS55117985A JP2598879A JP2598879A JPS55117985A JP S55117985 A JPS55117985 A JP S55117985A JP 2598879 A JP2598879 A JP 2598879A JP 2598879 A JP2598879 A JP 2598879A JP S55117985 A JPS55117985 A JP S55117985A
Authority
JP
Japan
Prior art keywords
ion beam
beam quantity
measuring element
secondary electron
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2598879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6117308B2 (enrdf_load_stackoverflow
Inventor
Kazuaki Miyata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2598879A priority Critical patent/JPS55117985A/ja
Publication of JPS55117985A publication Critical patent/JPS55117985A/ja
Publication of JPS6117308B2 publication Critical patent/JPS6117308B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
JP2598879A 1979-03-05 1979-03-05 Ion beam quantity measuring unit Granted JPS55117985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2598879A JPS55117985A (en) 1979-03-05 1979-03-05 Ion beam quantity measuring unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2598879A JPS55117985A (en) 1979-03-05 1979-03-05 Ion beam quantity measuring unit

Publications (2)

Publication Number Publication Date
JPS55117985A true JPS55117985A (en) 1980-09-10
JPS6117308B2 JPS6117308B2 (enrdf_load_stackoverflow) 1986-05-07

Family

ID=12181086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2598879A Granted JPS55117985A (en) 1979-03-05 1979-03-05 Ion beam quantity measuring unit

Country Status (1)

Country Link
JP (1) JPS55117985A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6298547A (ja) * 1985-10-24 1987-05-08 Nissin Electric Co Ltd イオン注入装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636235A (ja) * 1986-06-24 1988-01-12 Bridgestone Corp バンプストツパ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6298547A (ja) * 1985-10-24 1987-05-08 Nissin Electric Co Ltd イオン注入装置

Also Published As

Publication number Publication date
JPS6117308B2 (enrdf_load_stackoverflow) 1986-05-07

Similar Documents

Publication Publication Date Title
GB2021789A (en) Monitoring voltage using an electron beam probe
JPS55117985A (en) Ion beam quantity measuring unit
US3477023A (en) Apparatus for measuring the energy and current of an accelerator electron beam including apertured incident and exit electrodes
Yamamoto et al. Dosimetry of pulsed X-rays of high exposure rate generated by an electron linear accelerator with an ionization chamber
JPS6419664A (en) Ion beam device
Okabe et al. Nonobstructive low energy electron beam monitor
Bencivenni et al. Measurement of GEM parameters with X-rays
Gomi et al. Simultaneous Measurement of Intensity and Maximum Energy of Bremsstrahlung Photon Beam
JPS5727554A (en) Tetrode mass spectrograph
JPS55119397A (en) X-ray tube device
JPS57115752A (en) Ion detector for mass spectrograph
JPS5380129A (en) Protection cuicuit
Cossairt et al. Measurements of radiation quality factors using a recombination chamber
JPS5587069A (en) Detector for radiation
JPS5616853A (en) Surface analysis unit
JPS5580255A (en) Charged particle beam processing device
JPS5629182A (en) Detector for atomic beam
JPS55134930A (en) Ion implantation
Shaw et al. A high power Faraday cup to measure extracted beam current from the Bates South Hall Ring
JPS5374470A (en) Measuring instrument for surface electric potential
JPS54158993A (en) Ionization type smoke detector
CN114265103A (zh) 一种β粒子束流测量装置
JPS556737A (en) Scan electron microscope
JPS5787054A (en) Charged particle irradiation system
Liesem Average energy to create an ion pair in air by uranium and lead ions of about 4 MeV/amu