JPS55117985A - Ion beam quantity measuring unit - Google Patents

Ion beam quantity measuring unit

Info

Publication number
JPS55117985A
JPS55117985A JP2598879A JP2598879A JPS55117985A JP S55117985 A JPS55117985 A JP S55117985A JP 2598879 A JP2598879 A JP 2598879A JP 2598879 A JP2598879 A JP 2598879A JP S55117985 A JPS55117985 A JP S55117985A
Authority
JP
Japan
Prior art keywords
ion beam
beam quantity
measuring element
secondary electron
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2598879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6117308B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kazuaki Miyata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2598879A priority Critical patent/JPS55117985A/ja
Publication of JPS55117985A publication Critical patent/JPS55117985A/ja
Publication of JPS6117308B2 publication Critical patent/JPS6117308B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
JP2598879A 1979-03-05 1979-03-05 Ion beam quantity measuring unit Granted JPS55117985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2598879A JPS55117985A (en) 1979-03-05 1979-03-05 Ion beam quantity measuring unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2598879A JPS55117985A (en) 1979-03-05 1979-03-05 Ion beam quantity measuring unit

Publications (2)

Publication Number Publication Date
JPS55117985A true JPS55117985A (en) 1980-09-10
JPS6117308B2 JPS6117308B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-07

Family

ID=12181086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2598879A Granted JPS55117985A (en) 1979-03-05 1979-03-05 Ion beam quantity measuring unit

Country Status (1)

Country Link
JP (1) JPS55117985A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6298547A (ja) * 1985-10-24 1987-05-08 Nissin Electric Co Ltd イオン注入装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636235A (ja) * 1986-06-24 1988-01-12 Bridgestone Corp バンプストツパ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6298547A (ja) * 1985-10-24 1987-05-08 Nissin Electric Co Ltd イオン注入装置

Also Published As

Publication number Publication date
JPS6117308B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-07

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