JPS5510502A - Moisture sensitive element - Google Patents
Moisture sensitive elementInfo
- Publication number
- JPS5510502A JPS5510502A JP6288578A JP6288578A JPS5510502A JP S5510502 A JPS5510502 A JP S5510502A JP 6288578 A JP6288578 A JP 6288578A JP 6288578 A JP6288578 A JP 6288578A JP S5510502 A JPS5510502 A JP S5510502A
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- sensitive element
- substrate
- polymer
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920000642 polymer Polymers 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
- 239000010409 thin film Substances 0.000 abstract 2
- LOPVAWVHGAWUPS-UHFFFAOYSA-M [2-hydroxy-3-(2-methylprop-2-enoyloxy)propyl]-trimethylazanium;chloride Chemical compound [Cl-].CC(=C)C(=O)OCC(O)C[N+](C)(C)C LOPVAWVHGAWUPS-UHFFFAOYSA-M 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 125000002091 cationic group Chemical group 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000178 monomer Substances 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6288578A JPS5510502A (en) | 1978-05-25 | 1978-05-25 | Moisture sensitive element |
DE19792920808 DE2920808C2 (de) | 1978-05-25 | 1979-05-22 | Meßfühler und Schaltung zur Feuchtigkeitsmessung |
CH489079A CH641566A5 (de) | 1978-05-25 | 1979-05-25 | Feuchtigkeitsmessfuehler und dessen verwendung in einer messanordnung. |
GB7918462A GB2025622B (en) | 1978-05-25 | 1979-05-25 | Humidity sensor and a humidity detection circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6288578A JPS5510502A (en) | 1978-05-25 | 1978-05-25 | Moisture sensitive element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5510502A true JPS5510502A (en) | 1980-01-25 |
JPS627976B2 JPS627976B2 (enrdf_load_stackoverflow) | 1987-02-20 |
Family
ID=13213151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6288578A Granted JPS5510502A (en) | 1978-05-25 | 1978-05-25 | Moisture sensitive element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5510502A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59133453A (ja) * | 1983-01-20 | 1984-07-31 | Sanyo Electric Co Ltd | 感湿素子 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4882877A (enrdf_load_stackoverflow) * | 1972-02-02 | 1973-11-06 | ||
JPS5480191A (en) * | 1977-12-08 | 1979-06-26 | Shinei Kk | Humidityysensitive element |
-
1978
- 1978-05-25 JP JP6288578A patent/JPS5510502A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4882877A (enrdf_load_stackoverflow) * | 1972-02-02 | 1973-11-06 | ||
JPS5480191A (en) * | 1977-12-08 | 1979-06-26 | Shinei Kk | Humidityysensitive element |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59133453A (ja) * | 1983-01-20 | 1984-07-31 | Sanyo Electric Co Ltd | 感湿素子 |
Also Published As
Publication number | Publication date |
---|---|
JPS627976B2 (enrdf_load_stackoverflow) | 1987-02-20 |
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