JPS55101804A - Positioning apparatus - Google Patents

Positioning apparatus

Info

Publication number
JPS55101804A
JPS55101804A JP1008079A JP1008079A JPS55101804A JP S55101804 A JPS55101804 A JP S55101804A JP 1008079 A JP1008079 A JP 1008079A JP 1008079 A JP1008079 A JP 1008079A JP S55101804 A JPS55101804 A JP S55101804A
Authority
JP
Japan
Prior art keywords
grid
diffraction
light
amplifier
disturbed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1008079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6126605B2 (enrdf_load_stackoverflow
Inventor
Akira Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1008079A priority Critical patent/JPS55101804A/ja
Priority to US06/114,354 priority patent/US4332473A/en
Priority to DE3003533A priority patent/DE3003533C2/de
Publication of JPS55101804A publication Critical patent/JPS55101804A/ja
Publication of JPS6126605B2 publication Critical patent/JPS6126605B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP1008079A 1979-01-31 1979-01-31 Positioning apparatus Granted JPS55101804A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1008079A JPS55101804A (en) 1979-01-31 1979-01-31 Positioning apparatus
US06/114,354 US4332473A (en) 1979-01-31 1980-01-22 Apparatus for detecting a mutual positional relationship of two sample members
DE3003533A DE3003533C2 (de) 1979-01-31 1980-01-31 Vorrichtung zur Bestimmung der gegenseitigen Lagebeziehung zwischen zwei Prüflingen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1008079A JPS55101804A (en) 1979-01-31 1979-01-31 Positioning apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP16536685A Division JPS61116605A (ja) 1985-07-26 1985-07-26 位置合せ装置

Publications (2)

Publication Number Publication Date
JPS55101804A true JPS55101804A (en) 1980-08-04
JPS6126605B2 JPS6126605B2 (enrdf_load_stackoverflow) 1986-06-21

Family

ID=11740363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1008079A Granted JPS55101804A (en) 1979-01-31 1979-01-31 Positioning apparatus

Country Status (1)

Country Link
JP (1) JPS55101804A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6167512U (enrdf_load_stackoverflow) * 1984-10-09 1986-05-09
US4588899A (en) * 1984-06-07 1986-05-13 Rca Corporation Alignment method
JPH01232214A (ja) * 1988-03-11 1989-09-18 Canon Inc エンコーダ
JPH0293305A (ja) * 1988-09-30 1990-04-04 Canon Inc 位置合わせ装置
JP2007180548A (ja) * 2005-12-27 2007-07-12 Asml Netherlands Bv パターンアライメント方法およびリソグラフィ装置
JP2014228490A (ja) * 2013-05-24 2014-12-08 太陽誘電株式会社 変位計測装置及び変位計測方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4588899A (en) * 1984-06-07 1986-05-13 Rca Corporation Alignment method
JPS6167512U (enrdf_load_stackoverflow) * 1984-10-09 1986-05-09
JPH01232214A (ja) * 1988-03-11 1989-09-18 Canon Inc エンコーダ
JPH0293305A (ja) * 1988-09-30 1990-04-04 Canon Inc 位置合わせ装置
JP2007180548A (ja) * 2005-12-27 2007-07-12 Asml Netherlands Bv パターンアライメント方法およびリソグラフィ装置
JP2014228490A (ja) * 2013-05-24 2014-12-08 太陽誘電株式会社 変位計測装置及び変位計測方法

Also Published As

Publication number Publication date
JPS6126605B2 (enrdf_load_stackoverflow) 1986-06-21

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