JPS5510145B2 - - Google Patents
Info
- Publication number
- JPS5510145B2 JPS5510145B2 JP3658875A JP3658875A JPS5510145B2 JP S5510145 B2 JPS5510145 B2 JP S5510145B2 JP 3658875 A JP3658875 A JP 3658875A JP 3658875 A JP3658875 A JP 3658875A JP S5510145 B2 JPS5510145 B2 JP S5510145B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Non-Volatile Memory (AREA)
- Electrodes Of Semiconductors (AREA)
- Local Oxidation Of Silicon (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50036588A JPS51112187A (en) | 1975-03-28 | 1975-03-28 | Processing method of semiconductor equipment |
| US05/667,445 US4069067A (en) | 1975-03-20 | 1976-03-16 | Method of making a semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50036588A JPS51112187A (en) | 1975-03-28 | 1975-03-28 | Processing method of semiconductor equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51112187A JPS51112187A (en) | 1976-10-04 |
| JPS5510145B2 true JPS5510145B2 (ko) | 1980-03-14 |
Family
ID=12473924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50036588A Granted JPS51112187A (en) | 1975-03-20 | 1975-03-28 | Processing method of semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51112187A (ko) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6038876B2 (ja) * | 1976-07-02 | 1985-09-03 | 日本電信電話株式会社 | Ｍｉｓトランジスタを有する半導体装置の製法 |
| JPS5396769A (en) * | 1977-02-04 | 1978-08-24 | Nippon Telegr & Teleph Corp <Ntt> | Production of mis integratd circuit |
| EP0002107A3 (en) * | 1977-11-17 | 1979-09-05 | Rca Corporation | Method of making a planar semiconductor device |
| JPS54114479U (ko) * | 1978-01-31 | 1979-08-11 | ||
| JPS54124687A (en) * | 1978-03-20 | 1979-09-27 | Nec Corp | Production of semiconductor device |
| US4221044A (en) * | 1978-06-06 | 1980-09-09 | Rockwell International Corporation | Self-alignment of gate contacts at local or remote sites |
| JPS55105345A (en) * | 1979-02-07 | 1980-08-12 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS55166958A (en) * | 1979-06-15 | 1980-12-26 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
-
1975
- 1975-03-28 JP JP50036588A patent/JPS51112187A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51112187A (en) | 1976-10-04 |