JPS5496099A - Impurity concentration measuring apparatus - Google Patents
Impurity concentration measuring apparatusInfo
- Publication number
- JPS5496099A JPS5496099A JP305978A JP305978A JPS5496099A JP S5496099 A JPS5496099 A JP S5496099A JP 305978 A JP305978 A JP 305978A JP 305978 A JP305978 A JP 305978A JP S5496099 A JPS5496099 A JP S5496099A
- Authority
- JP
- Japan
- Prior art keywords
- output
- detector
- output signal
- inverting
- hysteresis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
PURPOSE: To realize accurate concentration measurement, keeping the flow rate constant, and preventing disturbance of control state due to noise component, by using a level detector having hysteresis in its inverting characteristics as a detector to detect the outout of the flowmeter.
CONSTITUTION: The output signal of a flow meter 4 is fed into a recording device 11, and is also fed into a level detector 13 through an amplifier 12. The device is constituted so as when the output signal Po of the amplifier 12 changes in the direction to go below the first set level V1 as shown in figures (a) and (b), an output Y is sent out; when changing in the direction to go beyond the second set level V2, an inverting output X is sent out. In this constitution, since a hysteresis is provided in the inverting characteristics of the output, the output of the detector 13 introduces signals X, Y into a controller 7, which energize a blower 6 and a heater 5, respectively. But, even if the output signal from the flow meter 4 contains noise component, heating and cooling may not be repeated at other than necessary points. Therefore, accurate measurements may be achieved without disturbance of the control form due to noise.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP305978A JPS5496099A (en) | 1978-01-14 | 1978-01-14 | Impurity concentration measuring apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP305978A JPS5496099A (en) | 1978-01-14 | 1978-01-14 | Impurity concentration measuring apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5496099A true JPS5496099A (en) | 1979-07-30 |
JPS6136172B2 JPS6136172B2 (en) | 1986-08-16 |
Family
ID=11546743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP305978A Granted JPS5496099A (en) | 1978-01-14 | 1978-01-14 | Impurity concentration measuring apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5496099A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6276656U (en) * | 1985-11-01 | 1987-05-16 |
-
1978
- 1978-01-14 JP JP305978A patent/JPS5496099A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6276656U (en) * | 1985-11-01 | 1987-05-16 |
Also Published As
Publication number | Publication date |
---|---|
JPS6136172B2 (en) | 1986-08-16 |
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