JPS5496099A - Impurity concentration measuring apparatus - Google Patents

Impurity concentration measuring apparatus

Info

Publication number
JPS5496099A
JPS5496099A JP305978A JP305978A JPS5496099A JP S5496099 A JPS5496099 A JP S5496099A JP 305978 A JP305978 A JP 305978A JP 305978 A JP305978 A JP 305978A JP S5496099 A JPS5496099 A JP S5496099A
Authority
JP
Japan
Prior art keywords
output
detector
output signal
inverting
hysteresis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP305978A
Other languages
Japanese (ja)
Other versions
JPS6136172B2 (en
Inventor
Ryoichi Otani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP305978A priority Critical patent/JPS5496099A/en
Publication of JPS5496099A publication Critical patent/JPS5496099A/en
Publication of JPS6136172B2 publication Critical patent/JPS6136172B2/ja
Granted legal-status Critical Current

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  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

PURPOSE: To realize accurate concentration measurement, keeping the flow rate constant, and preventing disturbance of control state due to noise component, by using a level detector having hysteresis in its inverting characteristics as a detector to detect the outout of the flowmeter.
CONSTITUTION: The output signal of a flow meter 4 is fed into a recording device 11, and is also fed into a level detector 13 through an amplifier 12. The device is constituted so as when the output signal Po of the amplifier 12 changes in the direction to go below the first set level V1 as shown in figures (a) and (b), an output Y is sent out; when changing in the direction to go beyond the second set level V2, an inverting output X is sent out. In this constitution, since a hysteresis is provided in the inverting characteristics of the output, the output of the detector 13 introduces signals X, Y into a controller 7, which energize a blower 6 and a heater 5, respectively. But, even if the output signal from the flow meter 4 contains noise component, heating and cooling may not be repeated at other than necessary points. Therefore, accurate measurements may be achieved without disturbance of the control form due to noise.
COPYRIGHT: (C)1979,JPO&Japio
JP305978A 1978-01-14 1978-01-14 Impurity concentration measuring apparatus Granted JPS5496099A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP305978A JPS5496099A (en) 1978-01-14 1978-01-14 Impurity concentration measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP305978A JPS5496099A (en) 1978-01-14 1978-01-14 Impurity concentration measuring apparatus

Publications (2)

Publication Number Publication Date
JPS5496099A true JPS5496099A (en) 1979-07-30
JPS6136172B2 JPS6136172B2 (en) 1986-08-16

Family

ID=11546743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP305978A Granted JPS5496099A (en) 1978-01-14 1978-01-14 Impurity concentration measuring apparatus

Country Status (1)

Country Link
JP (1) JPS5496099A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6276656U (en) * 1985-11-01 1987-05-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6276656U (en) * 1985-11-01 1987-05-16

Also Published As

Publication number Publication date
JPS6136172B2 (en) 1986-08-16

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