JPS5490967A - Method of fabricating silicon carbide reactive tube - Google Patents

Method of fabricating silicon carbide reactive tube

Info

Publication number
JPS5490967A
JPS5490967A JP14354877A JP14354877A JPS5490967A JP S5490967 A JPS5490967 A JP S5490967A JP 14354877 A JP14354877 A JP 14354877A JP 14354877 A JP14354877 A JP 14354877A JP S5490967 A JPS5490967 A JP S5490967A
Authority
JP
Japan
Prior art keywords
silicon carbide
fabricating silicon
reactive tube
carbide reactive
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14354877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6120129B2 (enrdf_load_stackoverflow
Inventor
Kazunari Ban
Hideyasu Matsuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP14354877A priority Critical patent/JPS5490967A/ja
Publication of JPS5490967A publication Critical patent/JPS5490967A/ja
Publication of JPS6120129B2 publication Critical patent/JPS6120129B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Furnace Details (AREA)
JP14354877A 1977-11-30 1977-11-30 Method of fabricating silicon carbide reactive tube Granted JPS5490967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14354877A JPS5490967A (en) 1977-11-30 1977-11-30 Method of fabricating silicon carbide reactive tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14354877A JPS5490967A (en) 1977-11-30 1977-11-30 Method of fabricating silicon carbide reactive tube

Publications (2)

Publication Number Publication Date
JPS5490967A true JPS5490967A (en) 1979-07-19
JPS6120129B2 JPS6120129B2 (enrdf_load_stackoverflow) 1986-05-21

Family

ID=15341297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14354877A Granted JPS5490967A (en) 1977-11-30 1977-11-30 Method of fabricating silicon carbide reactive tube

Country Status (1)

Country Link
JP (1) JPS5490967A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3701691A1 (de) * 1986-07-31 1988-02-04 Toshiba Ceramics Co Verfahren zum herstellen einer ofenkomponente
JPH0382117A (ja) * 1989-08-25 1991-04-08 Toshiba Ceramics Co Ltd 半導体ウエハ処理用治具の製造方法
WO2010091473A1 (en) * 2009-02-12 2010-08-19 Griffith University A chemical vapour deposition system and process

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3701691A1 (de) * 1986-07-31 1988-02-04 Toshiba Ceramics Co Verfahren zum herstellen einer ofenkomponente
JPH0382117A (ja) * 1989-08-25 1991-04-08 Toshiba Ceramics Co Ltd 半導体ウエハ処理用治具の製造方法
WO2010091473A1 (en) * 2009-02-12 2010-08-19 Griffith University A chemical vapour deposition system and process
US9011600B2 (en) 2009-02-12 2015-04-21 Griffith University Chemical vapour deposition system and process

Also Published As

Publication number Publication date
JPS6120129B2 (enrdf_load_stackoverflow) 1986-05-21

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