JPS5477151A - Optical step meter - Google Patents

Optical step meter

Info

Publication number
JPS5477151A
JPS5477151A JP14332077A JP14332077A JPS5477151A JP S5477151 A JPS5477151 A JP S5477151A JP 14332077 A JP14332077 A JP 14332077A JP 14332077 A JP14332077 A JP 14332077A JP S5477151 A JPS5477151 A JP S5477151A
Authority
JP
Japan
Prior art keywords
bright spot
print plate
test piece
metering
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14332077A
Other languages
Japanese (ja)
Inventor
Masahito Nakajima
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14332077A priority Critical patent/JPS5477151A/en
Publication of JPS5477151A publication Critical patent/JPS5477151A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE: To make it possible to accurately meter the pattern thickness of a print plate wiring in a non-contact manner by shifting an optical system for irradiating the surface of a test piece, which is made of plural different materials, relative to the test piece.
CONSTITUTION: A print plate, which has its ceramic substrate 5 printed with a wiring pattern 4, is irradiated with the laser beam from its source 1 to establish a bright spot 6. An optical system, which is composed of a reflected light detector 9 for metering the reflected scattered light from the bright spot 6, a lens 3 for focusing the bright spot 6, and a position metering device 2 for metering the position of the real image of the bright spot 6, is shifted relative to the print plate so that the change in the material of the test piece is judged by the guantity of light entering the detector 9 and so that the positional shift of the real image of the bright spot 6 is metered by the device 2. Thus, it is possible to meter the thickness of the print plate wiring pattern without damaging the surface in a non-contact manner.
COPYRIGHT: (C)1979,JPO&Japio
JP14332077A 1977-12-01 1977-12-01 Optical step meter Pending JPS5477151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14332077A JPS5477151A (en) 1977-12-01 1977-12-01 Optical step meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14332077A JPS5477151A (en) 1977-12-01 1977-12-01 Optical step meter

Publications (1)

Publication Number Publication Date
JPS5477151A true JPS5477151A (en) 1979-06-20

Family

ID=15336030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14332077A Pending JPS5477151A (en) 1977-12-01 1977-12-01 Optical step meter

Country Status (1)

Country Link
JP (1) JPS5477151A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6098305A (en) * 1983-10-14 1985-06-01 オプテイツシエ．ウエルケ．ゲー．ローデンストツク Method and device for inspecting surface of structure member
JPH0199286A (en) * 1987-10-13 1989-04-18 Mitsubishi Electric Corp Screen printing
GB2510858B (en) * 2013-02-15 2017-05-10 Swain Stephen A table or chair levelling device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6098305A (en) * 1983-10-14 1985-06-01 オプテイツシエ．ウエルケ．ゲー．ローデンストツク Method and device for inspecting surface of structure member
JPH0199286A (en) * 1987-10-13 1989-04-18 Mitsubishi Electric Corp Screen printing
GB2510858B (en) * 2013-02-15 2017-05-10 Swain Stephen A table or chair levelling device

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