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Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
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Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co LtdfiledCriticalToshiba Corp
Priority to JP13826077ApriorityCriticalpatent/JPS5471687A/en
Publication of JPS5471687ApublicationCriticalpatent/JPS5471687A/en
PURPOSE: To judge helium leakage by providing detectors detecting the helium leakage of the objects being examined and the vacuum leakage of chambers.
CONSTITUTION: A valve V5 is opened and the helium leakage of the object being examined 11 is detected with a helium detector He10 for final testing. This detection signal is sent to a control board CR, where the judgement of the final testing is performed. Next, a chamber CH1 is rapidly set at the atmospheric pressure, after which the door of the chamber CH1 is opened. A robot body 10 carries its arm body 10a up to said chamber CH1 position and grips and draws out the object being examined 11. If it is defective, the object being examined 11 is carried on a defective conveying conveyor 15 and is sent for the specified place.
Detecting small sealing defects in nuclear fuel rods - by reducing surrounding pressure and measuring escape of helium using mass spectrometer isolated from vacuum pumps