JPS53143291A - Inspecting method of halogen gas leakage - Google Patents

Inspecting method of halogen gas leakage

Info

Publication number
JPS53143291A
JPS53143291A JP5808777A JP5808777A JPS53143291A JP S53143291 A JPS53143291 A JP S53143291A JP 5808777 A JP5808777 A JP 5808777A JP 5808777 A JP5808777 A JP 5808777A JP S53143291 A JPS53143291 A JP S53143291A
Authority
JP
Japan
Prior art keywords
halogen gas
gas leakage
inspecting method
detecting
leakage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5808777A
Other languages
Japanese (ja)
Inventor
Shigeru Shimasue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP5808777A priority Critical patent/JPS53143291A/en
Publication of JPS53143291A publication Critical patent/JPS53143291A/en
Pending legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE: To make possible detecting leaking positions accurately by coating covering material to the portion to be examined, force-feeding halogen gas to the inside of the inspecting body and detecting the presence or not of leakage through detecting of the halogen gas.
COPYRIGHT: (C)1978,JPO&Japio
JP5808777A 1977-05-19 1977-05-19 Inspecting method of halogen gas leakage Pending JPS53143291A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5808777A JPS53143291A (en) 1977-05-19 1977-05-19 Inspecting method of halogen gas leakage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5808777A JPS53143291A (en) 1977-05-19 1977-05-19 Inspecting method of halogen gas leakage

Publications (1)

Publication Number Publication Date
JPS53143291A true JPS53143291A (en) 1978-12-13

Family

ID=13074139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5808777A Pending JPS53143291A (en) 1977-05-19 1977-05-19 Inspecting method of halogen gas leakage

Country Status (1)

Country Link
JP (1) JPS53143291A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01112129A (en) * 1987-10-26 1989-04-28 Mitsubishi Motors Corp Leak position detecting method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01112129A (en) * 1987-10-26 1989-04-28 Mitsubishi Motors Corp Leak position detecting method

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