JPS52142973A - Leakage detecting method of tight parts - Google Patents

Leakage detecting method of tight parts

Info

Publication number
JPS52142973A
JPS52142973A JP6039476A JP6039476A JPS52142973A JP S52142973 A JPS52142973 A JP S52142973A JP 6039476 A JP6039476 A JP 6039476A JP 6039476 A JP6039476 A JP 6039476A JP S52142973 A JPS52142973 A JP S52142973A
Authority
JP
Japan
Prior art keywords
detecting method
leakage detecting
tight parts
parts
tight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6039476A
Other languages
Japanese (ja)
Inventor
Hidetaka Ikuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP6039476A priority Critical patent/JPS52142973A/en
Publication of JPS52142973A publication Critical patent/JPS52142973A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE: To perform inspection easily and rapidly by beforehand sealing testing gas before parts are made to products thus performing leakage inspection.
COPYRIGHT: (C)1977,JPO&Japio
JP6039476A 1976-05-24 1976-05-24 Leakage detecting method of tight parts Pending JPS52142973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6039476A JPS52142973A (en) 1976-05-24 1976-05-24 Leakage detecting method of tight parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6039476A JPS52142973A (en) 1976-05-24 1976-05-24 Leakage detecting method of tight parts

Publications (1)

Publication Number Publication Date
JPS52142973A true JPS52142973A (en) 1977-11-29

Family

ID=13140883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6039476A Pending JPS52142973A (en) 1976-05-24 1976-05-24 Leakage detecting method of tight parts

Country Status (1)

Country Link
JP (1) JPS52142973A (en)

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