JPS5390767A - Hermetic sealing testing method of semiconductor parts - Google Patents

Hermetic sealing testing method of semiconductor parts

Info

Publication number
JPS5390767A
JPS5390767A JP545177A JP545177A JPS5390767A JP S5390767 A JPS5390767 A JP S5390767A JP 545177 A JP545177 A JP 545177A JP 545177 A JP545177 A JP 545177A JP S5390767 A JPS5390767 A JP S5390767A
Authority
JP
Japan
Prior art keywords
testing method
semiconductor parts
hermetic sealing
sealing testing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP545177A
Other languages
Japanese (ja)
Inventor
Nobushige Kashiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP545177A priority Critical patent/JPS5390767A/en
Publication of JPS5390767A publication Critical patent/JPS5390767A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To predict the stability to thermal distortion by performing thermal aging simultaneously with the pressure test of semiconductor parts.
COPYRIGHT: (C)1978,JPO&Japio
JP545177A 1977-01-20 1977-01-20 Hermetic sealing testing method of semiconductor parts Pending JPS5390767A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP545177A JPS5390767A (en) 1977-01-20 1977-01-20 Hermetic sealing testing method of semiconductor parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP545177A JPS5390767A (en) 1977-01-20 1977-01-20 Hermetic sealing testing method of semiconductor parts

Publications (1)

Publication Number Publication Date
JPS5390767A true JPS5390767A (en) 1978-08-09

Family

ID=11611564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP545177A Pending JPS5390767A (en) 1977-01-20 1977-01-20 Hermetic sealing testing method of semiconductor parts

Country Status (1)

Country Link
JP (1) JPS5390767A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190572A (en) * 1975-02-07 1976-08-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190572A (en) * 1975-02-07 1976-08-09

Similar Documents

Publication Publication Date Title
JPS53107516A (en) Airtight connection structure
JPS5216178A (en) Airtightness testing device
JPS5390767A (en) Hermetic sealing testing method of semiconductor parts
JPS527788A (en) Method to test water proof of pocket watch
JPS52134486A (en) Pressure resistance testing method
JPS5417790A (en) Gas leakage supervising method
JPS5389675A (en) Jig pair for wafer transfer
JPS5411671A (en) Sealing method of semiconductor device
JPS5310277A (en) Testing method of semiconductor elements
JPS53106571A (en) Testing method of galllium aresenide semi-insulating substrate
JPS522459A (en) Balance
JPS5231671A (en) Sealing method of semiconductor device
JPS5339449A (en) Simple air-tightness deterioration testing method for arrester
JPS5420782A (en) Jig for high temperature tension test
JPS5255875A (en) Leak testing method
JPS5442635A (en) Inspection method
JPS5385485A (en) Pressure tester
JPS52142973A (en) Leakage detecting method of tight parts
JPS5383430A (en) Test method for terminal unit
JPS53135690A (en) Air tight inspecting apparatus
JPS5396434A (en) Synchronizing rectifier circuit
JPS5228052A (en) Molding process for refractory insulator
JPS5363520A (en) Testing corona in three-phase transformer
JPS51114988A (en) Breathed air measuring method by mass analyser
JPS5325495A (en) Gas leak alarm device