JPS5467775A - Film quality evaluation method of insulation film - Google Patents

Film quality evaluation method of insulation film

Info

Publication number
JPS5467775A
JPS5467775A JP13492877A JP13492877A JPS5467775A JP S5467775 A JPS5467775 A JP S5467775A JP 13492877 A JP13492877 A JP 13492877A JP 13492877 A JP13492877 A JP 13492877A JP S5467775 A JPS5467775 A JP S5467775A
Authority
JP
Japan
Prior art keywords
film
increment
liquid crystal
places
voltage value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13492877A
Other languages
English (en)
Other versions
JPS592376B2 (ja
Inventor
Sunao Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13492877A priority Critical patent/JPS592376B2/ja
Publication of JPS5467775A publication Critical patent/JPS5467775A/ja
Publication of JPS592376B2 publication Critical patent/JPS592376B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13492877A 1977-11-09 1977-11-09 絶縁膜の膜質評価法 Expired JPS592376B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13492877A JPS592376B2 (ja) 1977-11-09 1977-11-09 絶縁膜の膜質評価法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13492877A JPS592376B2 (ja) 1977-11-09 1977-11-09 絶縁膜の膜質評価法

Publications (2)

Publication Number Publication Date
JPS5467775A true JPS5467775A (en) 1979-05-31
JPS592376B2 JPS592376B2 (ja) 1984-01-18

Family

ID=15139816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13492877A Expired JPS592376B2 (ja) 1977-11-09 1977-11-09 絶縁膜の膜質評価法

Country Status (1)

Country Link
JP (1) JPS592376B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132045A (en) * 1981-02-09 1982-08-16 Seiko Epson Corp Pin hole tester
CN115070601A (zh) * 2021-05-14 2022-09-20 台湾积体电路制造股份有限公司 用于浆料质量监测的方法和系统

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132045A (en) * 1981-02-09 1982-08-16 Seiko Epson Corp Pin hole tester
CN115070601A (zh) * 2021-05-14 2022-09-20 台湾积体电路制造股份有限公司 用于浆料质量监测的方法和系统

Also Published As

Publication number Publication date
JPS592376B2 (ja) 1984-01-18

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