JPS5452312A - Room pressure controller - Google Patents

Room pressure controller

Info

Publication number
JPS5452312A
JPS5452312A JP11835677A JP11835677A JPS5452312A JP S5452312 A JPS5452312 A JP S5452312A JP 11835677 A JP11835677 A JP 11835677A JP 11835677 A JP11835677 A JP 11835677A JP S5452312 A JPS5452312 A JP S5452312A
Authority
JP
Japan
Prior art keywords
chamber
main
pressure
sub
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11835677A
Other languages
English (en)
Inventor
Noritsugu Tanaka
Fumitaka Ishizuka
Saburo Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP11835677A priority Critical patent/JPS5452312A/ja
Publication of JPS5452312A publication Critical patent/JPS5452312A/ja
Pending legal-status Critical Current

Links

JP11835677A 1977-09-30 1977-09-30 Room pressure controller Pending JPS5452312A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11835677A JPS5452312A (en) 1977-09-30 1977-09-30 Room pressure controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11835677A JPS5452312A (en) 1977-09-30 1977-09-30 Room pressure controller

Publications (1)

Publication Number Publication Date
JPS5452312A true JPS5452312A (en) 1979-04-24

Family

ID=14734668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11835677A Pending JPS5452312A (en) 1977-09-30 1977-09-30 Room pressure controller

Country Status (1)

Country Link
JP (1) JPS5452312A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9044541B2 (en) 2005-12-02 2015-06-02 C. R. Bard, Inc. Pressure activated proximal valves

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9044541B2 (en) 2005-12-02 2015-06-02 C. R. Bard, Inc. Pressure activated proximal valves
US9943678B2 (en) 2005-12-02 2018-04-17 C. R. Bard, Inc. Pressure activated proximal valves
US11305102B2 (en) 2005-12-02 2022-04-19 C. R. Bard, Inc. Pressure activated proximal valves

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