JPS5451589A - Slit device in mass spectrometer - Google Patents

Slit device in mass spectrometer

Info

Publication number
JPS5451589A
JPS5451589A JP11673677A JP11673677A JPS5451589A JP S5451589 A JPS5451589 A JP S5451589A JP 11673677 A JP11673677 A JP 11673677A JP 11673677 A JP11673677 A JP 11673677A JP S5451589 A JPS5451589 A JP S5451589A
Authority
JP
Japan
Prior art keywords
slit
resolving power
knife
width
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11673677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6112544B2 (enExample
Inventor
Eiji Tajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11673677A priority Critical patent/JPS5451589A/ja
Publication of JPS5451589A publication Critical patent/JPS5451589A/ja
Publication of JPS6112544B2 publication Critical patent/JPS6112544B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP11673677A 1977-09-30 1977-09-30 Slit device in mass spectrometer Granted JPS5451589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11673677A JPS5451589A (en) 1977-09-30 1977-09-30 Slit device in mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11673677A JPS5451589A (en) 1977-09-30 1977-09-30 Slit device in mass spectrometer

Publications (2)

Publication Number Publication Date
JPS5451589A true JPS5451589A (en) 1979-04-23
JPS6112544B2 JPS6112544B2 (enExample) 1986-04-09

Family

ID=14694506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11673677A Granted JPS5451589A (en) 1977-09-30 1977-09-30 Slit device in mass spectrometer

Country Status (1)

Country Link
JP (1) JPS5451589A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03138850A (ja) * 1989-10-23 1991-06-13 Hitachi Ltd ２次イオン質量分析装置
WO2007114120A1 (ja) * 2006-03-31 2007-10-11 Ihi Corporation イオン注入装置
JP2020071907A (ja) * 2018-10-29 2020-05-07 三菱電機株式会社 イオン注入装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0546869U (ja) * 1991-12-05 1993-06-22 川崎重工業株式会社 鋼板吸着引付け装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03138850A (ja) * 1989-10-23 1991-06-13 Hitachi Ltd ２次イオン質量分析装置
WO2007114120A1 (ja) * 2006-03-31 2007-10-11 Ihi Corporation イオン注入装置
JP2007273368A (ja) * 2006-03-31 2007-10-18 Ihi Corp イオン注入装置
US7964856B2 (en) 2006-03-31 2011-06-21 Ihi Corporation Ion implanting apparatus
JP2020071907A (ja) * 2018-10-29 2020-05-07 三菱電機株式会社 イオン注入装置

Also Published As

Publication number Publication date
JPS6112544B2 (enExample) 1986-04-09

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