JPS5451384A - Electron beam radiation apparatus - Google Patents

Electron beam radiation apparatus

Info

Publication number
JPS5451384A
JPS5451384A JP11677177A JP11677177A JPS5451384A JP S5451384 A JPS5451384 A JP S5451384A JP 11677177 A JP11677177 A JP 11677177A JP 11677177 A JP11677177 A JP 11677177A JP S5451384 A JPS5451384 A JP S5451384A
Authority
JP
Japan
Prior art keywords
sample
electron beam
chamber
switch
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11677177A
Other languages
English (en)
Other versions
JPS5855656B2 (ja
Inventor
Kazumitsu Nakamura
Yoshimasa Unno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11677177A priority Critical patent/JPS5855656B2/ja
Publication of JPS5451384A publication Critical patent/JPS5451384A/ja
Publication of JPS5855656B2 publication Critical patent/JPS5855656B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP11677177A 1977-09-30 1977-09-30 電子線照射装置 Expired JPS5855656B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11677177A JPS5855656B2 (ja) 1977-09-30 1977-09-30 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11677177A JPS5855656B2 (ja) 1977-09-30 1977-09-30 電子線照射装置

Publications (2)

Publication Number Publication Date
JPS5451384A true JPS5451384A (en) 1979-04-23
JPS5855656B2 JPS5855656B2 (ja) 1983-12-10

Family

ID=14695312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11677177A Expired JPS5855656B2 (ja) 1977-09-30 1977-09-30 電子線照射装置

Country Status (1)

Country Link
JP (1) JPS5855656B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816526A (ja) * 1981-07-22 1983-01-31 Toshiba Corp 電子ビ−ム露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816526A (ja) * 1981-07-22 1983-01-31 Toshiba Corp 電子ビ−ム露光装置

Also Published As

Publication number Publication date
JPS5855656B2 (ja) 1983-12-10

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