JPS51117877A - Automatic prober - Google Patents

Automatic prober

Info

Publication number
JPS51117877A
JPS51117877A JP4307775A JP4307775A JPS51117877A JP S51117877 A JPS51117877 A JP S51117877A JP 4307775 A JP4307775 A JP 4307775A JP 4307775 A JP4307775 A JP 4307775A JP S51117877 A JPS51117877 A JP S51117877A
Authority
JP
Japan
Prior art keywords
automatic prober
automatic
prober
desists
overstepping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4307775A
Other languages
Japanese (ja)
Inventor
Akiji Satsuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP4307775A priority Critical patent/JPS51117877A/en
Publication of JPS51117877A publication Critical patent/JPS51117877A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: Time required for shifting for inspection is reduced by providing an overstep control circuit which desists overstepping at positions unnecessary for automatic probers.
COPYRIGHT: (C)1976,JPO&Japio
JP4307775A 1975-04-09 1975-04-09 Automatic prober Pending JPS51117877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4307775A JPS51117877A (en) 1975-04-09 1975-04-09 Automatic prober

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4307775A JPS51117877A (en) 1975-04-09 1975-04-09 Automatic prober

Publications (1)

Publication Number Publication Date
JPS51117877A true JPS51117877A (en) 1976-10-16

Family

ID=12653773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4307775A Pending JPS51117877A (en) 1975-04-09 1975-04-09 Automatic prober

Country Status (1)

Country Link
JP (1) JPS51117877A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611034A (en) * 1984-06-14 1986-01-07 Hitachi Electronics Eng Co Ltd Pattern inspecting device for wafer chip
JPS63107038A (en) * 1981-11-02 1988-05-12 ジヨセフ　クバトロニツク Miniature circuit processing device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63107038A (en) * 1981-11-02 1988-05-12 ジヨセフ　クバトロニツク Miniature circuit processing device
JPH055377B2 (en) * 1981-11-02 1993-01-22 Kubatoronitsuku Josefu
JPS611034A (en) * 1984-06-14 1986-01-07 Hitachi Electronics Eng Co Ltd Pattern inspecting device for wafer chip

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