JPS5443476B2 - - Google Patents

Info

Publication number
JPS5443476B2
JPS5443476B2 JP5065574A JP5065574A JPS5443476B2 JP S5443476 B2 JPS5443476 B2 JP S5443476B2 JP 5065574 A JP5065574 A JP 5065574A JP 5065574 A JP5065574 A JP 5065574A JP S5443476 B2 JPS5443476 B2 JP S5443476B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5065574A
Other languages
Japanese (ja)
Other versions
JPS5015705A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5015705A publication Critical patent/JPS5015705A/ja
Publication of JPS5443476B2 publication Critical patent/JPS5443476B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/911—Seed or rod holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S269/00—Work holders
    • Y10S269/903—Work holder for electrical circuit assemblages or wiring systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/17—Socket type
    • Y10T279/17761—Side detent
    • Y10T279/17821—Set screw

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP5065574A 1973-05-07 1974-05-07 Expired JPS5443476B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2322969A DE2322969C3 (de) 1973-05-07 1973-05-07 Vorrichtung zum Haltern der Stabenden beim tiegelfreien Zonenschmelzen

Publications (2)

Publication Number Publication Date
JPS5015705A JPS5015705A (enrdf_load_stackoverflow) 1975-02-19
JPS5443476B2 true JPS5443476B2 (enrdf_load_stackoverflow) 1979-12-20

Family

ID=5880196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5065574A Expired JPS5443476B2 (enrdf_load_stackoverflow) 1973-05-07 1974-05-07

Country Status (6)

Country Link
US (1) US3901499A (enrdf_load_stackoverflow)
JP (1) JPS5443476B2 (enrdf_load_stackoverflow)
BE (1) BE814657A (enrdf_load_stackoverflow)
DE (1) DE2322969C3 (enrdf_load_stackoverflow)
DK (1) DK135409C (enrdf_load_stackoverflow)
IT (1) IT1010390B (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2529366A1 (de) * 1975-07-01 1977-01-20 Wacker Chemitronic Vorrichtung zum stuetzen eines kristallinen stabes
JPS5344351A (en) * 1976-10-06 1978-04-21 Shizuoka Seiki Co Ltd Grain dryer
US4257841A (en) * 1978-01-06 1981-03-24 Monsanto Company Stabilizing and supporting apparatus for float zone refined semiconductor crystal rod
US4448432A (en) * 1981-06-19 1984-05-15 French Errol J Sabre saw chuck
JP2617258B2 (ja) * 1991-11-28 1997-06-04 信越半導体株式会社 シリコン多結晶棒自重締付保持具
US6123864A (en) 1993-06-02 2000-09-26 Applied Materials, Inc. Etch chamber
US5843623A (en) * 1996-09-10 1998-12-01 International Business Machines Corporation Low profile substrate ground probe
US6044573A (en) * 1998-03-25 2000-04-04 Cockrill; Huston G. Measuring device
US8840723B2 (en) * 2009-03-10 2014-09-23 Mitsubishi Materials Corporation Manufacturing apparatus of polycrystalline silicon
DE102014213628B3 (de) * 2014-07-14 2015-10-22 Wacker Chemie Ag Halterung für Impflingskristalle und Siliciumstäbe sowie Verfahren zur Herstellung eines einkristallinen Siliciumstabes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999776A (en) * 1955-01-13 1961-09-12 Siemens Ag Method of producing differentiated doping zones in semiconductor crystals
NL240421A (enrdf_load_stackoverflow) * 1958-07-30
NL251304A (enrdf_load_stackoverflow) * 1959-05-08
DE1114171B (de) * 1959-12-31 1961-09-28 Siemens Ag Halterung fuer stabfoermiges Halbleitermaterial in Vorrichtungen zum tiegelfreien Zonenschmelzen

Also Published As

Publication number Publication date
DK135409B (da) 1977-04-25
US3901499A (en) 1975-08-26
DK135409C (da) 1977-10-10
DE2322969B2 (de) 1980-02-28
DE2322969C3 (de) 1980-10-16
IT1010390B (it) 1977-01-10
JPS5015705A (enrdf_load_stackoverflow) 1975-02-19
BE814657A (fr) 1974-09-02
DE2322969A1 (de) 1974-11-28

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