DK135409C - Indretning til at holde stavenderne ved digelfri zonesmeltning - Google Patents
Indretning til at holde stavenderne ved digelfri zonesmeltningInfo
- Publication number
- DK135409C DK135409C DK245974A DK245974A DK135409C DK 135409 C DK135409 C DK 135409C DK 245974 A DK245974 A DK 245974A DK 245974 A DK245974 A DK 245974A DK 135409 C DK135409 C DK 135409C
- Authority
- DK
- Denmark
- Prior art keywords
- keeping
- zone melting
- stick end
- disclosure
- disclosure zone
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/285—Crystal holders, e.g. chucks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/911—Seed or rod holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S269/00—Work holders
- Y10S269/903—Work holder for electrical circuit assemblages or wiring systems
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/17—Socket type
- Y10T279/17761—Side detent
- Y10T279/17821—Set screw
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2322969A DE2322969C3 (de) | 1973-05-07 | 1973-05-07 | Vorrichtung zum Haltern der Stabenden beim tiegelfreien Zonenschmelzen |
Publications (2)
Publication Number | Publication Date |
---|---|
DK135409B DK135409B (da) | 1977-04-25 |
DK135409C true DK135409C (da) | 1977-10-10 |
Family
ID=5880196
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK245974A DK135409C (da) | 1973-05-07 | 1974-05-06 | Indretning til at holde stavenderne ved digelfri zonesmeltning |
Country Status (6)
Country | Link |
---|---|
US (1) | US3901499A (da) |
JP (1) | JPS5443476B2 (da) |
BE (1) | BE814657A (da) |
DE (1) | DE2322969C3 (da) |
DK (1) | DK135409C (da) |
IT (1) | IT1010390B (da) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2529366A1 (de) * | 1975-07-01 | 1977-01-20 | Wacker Chemitronic | Vorrichtung zum stuetzen eines kristallinen stabes |
JPS5344351A (en) * | 1976-10-06 | 1978-04-21 | Shizuoka Seiki Co Ltd | Grain dryer |
US4257841A (en) * | 1978-01-06 | 1981-03-24 | Monsanto Company | Stabilizing and supporting apparatus for float zone refined semiconductor crystal rod |
US4448432A (en) * | 1981-06-19 | 1984-05-15 | French Errol J | Sabre saw chuck |
JP2617258B2 (ja) * | 1991-11-28 | 1997-06-04 | 信越半導体株式会社 | シリコン多結晶棒自重締付保持具 |
US6123864A (en) | 1993-06-02 | 2000-09-26 | Applied Materials, Inc. | Etch chamber |
US5843623A (en) * | 1996-09-10 | 1998-12-01 | International Business Machines Corporation | Low profile substrate ground probe |
US6044573A (en) * | 1998-03-25 | 2000-04-04 | Cockrill; Huston G. | Measuring device |
US8840723B2 (en) * | 2009-03-10 | 2014-09-23 | Mitsubishi Materials Corporation | Manufacturing apparatus of polycrystalline silicon |
DE102014213628B3 (de) * | 2014-07-14 | 2015-10-22 | Wacker Chemie Ag | Halterung für Impflingskristalle und Siliciumstäbe sowie Verfahren zur Herstellung eines einkristallinen Siliciumstabes |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2999776A (en) * | 1955-01-13 | 1961-09-12 | Siemens Ag | Method of producing differentiated doping zones in semiconductor crystals |
NL240421A (da) * | 1958-07-30 | |||
NL112832C (da) * | 1959-05-08 | |||
DE1114171B (de) * | 1959-12-31 | 1961-09-28 | Siemens Ag | Halterung fuer stabfoermiges Halbleitermaterial in Vorrichtungen zum tiegelfreien Zonenschmelzen |
-
1973
- 1973-05-07 DE DE2322969A patent/DE2322969C3/de not_active Expired
-
1974
- 1974-02-27 US US446160A patent/US3901499A/en not_active Expired - Lifetime
- 1974-05-03 IT IT22262/74A patent/IT1010390B/it active
- 1974-05-06 DK DK245974A patent/DK135409C/da active
- 1974-05-07 JP JP5065574A patent/JPS5443476B2/ja not_active Expired
- 1974-05-07 BE BE144013A patent/BE814657A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
US3901499A (en) | 1975-08-26 |
DK135409B (da) | 1977-04-25 |
DE2322969B2 (de) | 1980-02-28 |
BE814657A (fr) | 1974-09-02 |
DE2322969A1 (de) | 1974-11-28 |
JPS5443476B2 (da) | 1979-12-20 |
IT1010390B (it) | 1977-01-10 |
DE2322969C3 (de) | 1980-10-16 |
JPS5015705A (da) | 1975-02-19 |
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