JPS5442988A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5442988A
JPS5442988A JP10936977A JP10936977A JPS5442988A JP S5442988 A JPS5442988 A JP S5442988A JP 10936977 A JP10936977 A JP 10936977A JP 10936977 A JP10936977 A JP 10936977A JP S5442988 A JPS5442988 A JP S5442988A
Authority
JP
Japan
Prior art keywords
semiconductor device
layer
inter
installing
improve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10936977A
Other languages
Japanese (ja)
Inventor
Machio Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10936977A priority Critical patent/JPS5442988A/en
Publication of JPS5442988A publication Critical patent/JPS5442988A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Non-Volatile Memory (AREA)

Abstract

PURPOSE: To improve the inter-layer insulating dielectric strength by installing the multi-layer wiring or the gate via the insulating film containing PSG.
COPYRIGHT: (C)1979,JPO&Japio
JP10936977A 1977-09-09 1977-09-09 Semiconductor device Pending JPS5442988A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10936977A JPS5442988A (en) 1977-09-09 1977-09-09 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10936977A JPS5442988A (en) 1977-09-09 1977-09-09 Semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP13136786A Division JPS62247570A (en) 1986-06-06 1986-06-06 Non-volatile semiconductor memory

Publications (1)

Publication Number Publication Date
JPS5442988A true JPS5442988A (en) 1979-04-05

Family

ID=14508483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10936977A Pending JPS5442988A (en) 1977-09-09 1977-09-09 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5442988A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005236247A (en) * 2004-02-23 2005-09-02 Hynix Semiconductor Inc Manufacturing method of flash memory element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5178992A (en) * 1974-12-30 1976-07-09 Fujitsu Ltd Handotaisochino seizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5178992A (en) * 1974-12-30 1976-07-09 Fujitsu Ltd Handotaisochino seizohoho

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005236247A (en) * 2004-02-23 2005-09-02 Hynix Semiconductor Inc Manufacturing method of flash memory element
JP4642390B2 (en) * 2004-02-23 2011-03-02 株式会社ハイニックスセミコンダクター Method for manufacturing flash memory device

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