JPS5442988A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5442988A JPS5442988A JP10936977A JP10936977A JPS5442988A JP S5442988 A JPS5442988 A JP S5442988A JP 10936977 A JP10936977 A JP 10936977A JP 10936977 A JP10936977 A JP 10936977A JP S5442988 A JPS5442988 A JP S5442988A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- layer
- inter
- installing
- improve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Non-Volatile Memory (AREA)
Abstract
PURPOSE: To improve the inter-layer insulating dielectric strength by installing the multi-layer wiring or the gate via the insulating film containing PSG.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10936977A JPS5442988A (en) | 1977-09-09 | 1977-09-09 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10936977A JPS5442988A (en) | 1977-09-09 | 1977-09-09 | Semiconductor device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13136786A Division JPS62247570A (en) | 1986-06-06 | 1986-06-06 | Non-volatile semiconductor memory |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5442988A true JPS5442988A (en) | 1979-04-05 |
Family
ID=14508483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10936977A Pending JPS5442988A (en) | 1977-09-09 | 1977-09-09 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5442988A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005236247A (en) * | 2004-02-23 | 2005-09-02 | Hynix Semiconductor Inc | Manufacturing method of flash memory element |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5178992A (en) * | 1974-12-30 | 1976-07-09 | Fujitsu Ltd | Handotaisochino seizohoho |
-
1977
- 1977-09-09 JP JP10936977A patent/JPS5442988A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5178992A (en) * | 1974-12-30 | 1976-07-09 | Fujitsu Ltd | Handotaisochino seizohoho |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005236247A (en) * | 2004-02-23 | 2005-09-02 | Hynix Semiconductor Inc | Manufacturing method of flash memory element |
JP4642390B2 (en) * | 2004-02-23 | 2011-03-02 | 株式会社ハイニックスセミコンダクター | Method for manufacturing flash memory device |
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